CALCULATION OF RF PLASMA TORCH PARAMETERS BY MEANS OF NON-EQUILIBRIUM MODEL OF AR PLASMA

被引：1
|
作者：
Dresvin, S. [1 ]
Shi, Nguyen Kuok [1 ]
Ivanov, D. [1 ]
Amouroux, J. [2 ]
机构：
[1] Tech Univ, St Petersburg 195251, Russia
[2] LGPPTS, EMSCP, F-75005 Paris, France
来源：
HIGH TEMPERATURE MATERIAL PROCESSES | 2011年 / 15卷 / 01期
关键词：
modeling; ICP analysis; non-equilibrium; cold channel; 2T model;
D O I：
10.1615/HighTempMatProc.v15.i1.20
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Calculation of RF plasma torch parameters was made by means of non-equilibrium model of plasma. In this study it was calculated RF ICP plasma torch by frequency 28 MHz; power 2-4 kW, inner diameter of the torch 24 mm, plasma gas - argon. Plasma torch has three axial gas flows: sheath gas G(1) = 20 l/min, plasma gas G(2) = 2.4 l/min, transport gas G(3) = 3.4 l/min. Calculations have been performed within the frame of the method of the control volume. The results show that the injection of transport gas in the axis plasma zone leads to a strong disturbance of a thermal equilibrium and a cooling of the axis zone.
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收藏
页码：7 / 13
页数：7
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