Surface-modified piezoresistive nanocomposite flexible pressure sensors with high sensitivity and wide linearity

被引:99
作者
Shu, Yi [1 ,2 ]
Tian, He [1 ,2 ]
Yang, Yi [1 ,2 ]
Li, Cheng [1 ,2 ]
Cui, Yalong [1 ,2 ]
Mi, Wentian [1 ,2 ]
Li, Yuxing [1 ,2 ]
Wang, Zhe [1 ,2 ]
Deng, Ningqin [1 ,2 ]
Peng, Bo [1 ,2 ]
Ren, Tian-Ling [1 ,2 ]
机构
[1] Tsinghua Univ, Inst Microelect, Beijing 100084, Peoples R China
[2] Tsinghua Univ, Tsinghua Natl Lab Informat Sci & Technol, Beijing 100084, Peoples R China
关键词
SILICONE-RUBBER; ELECTRICAL-RESISTANCE; ELECTRONIC SKIN; LARGE-AREA; TRANSISTORS; STRAIN; ARRAYS;
D O I
10.1039/c5nr01259g
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Flexible pressure sensors working in a low pressure range (<10 kPa) have become an important part of recent research due to their applications in "artificial skin", foldable electronics and so on. Several efforts have been focused on the high sensitivity of devices with the neglect of linearity which is essential for real applications. Here, we present a device with a new Gaussian random distribution contact surface profile and a novel contact and piezoresistive composite working principle by numerical simulation, which predicts the combination of wide linearity and high sensitivity. With the modified surfaces' contact effect and the piezoresistive capability of these nanocomposite structures, an outstanding linearity can be achieved all along the measuring scale from 0 to 14 kPa, with a high sensitivity around 13.8 kPa(-1). The random distribution surface also provides the device with fine stability and reproducibility, which are validated in the test.
引用
收藏
页码:8636 / 8644
页数:9
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