Fabrication and application of diffractive optical elements

被引：14

作者：

Poleshchuk, A. G. ^{[1
]}

机构：

[1] Inst Automat & Electrometry SB RAS, Novosibirsk 630090, Russia

来源：

6TH INTERNATIONAL SYMPOSIUM ON PRECISION ENGINEERING MEASUREMENTS AND INSTRUMENTATION | 2010年 / 7544卷

关键词：

Diffractive optical elements; optical testing; circular laser writing system; angular encoder; interferometers; FILMS;

D O I：

10.1117/12.887434

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The fabrication methods of binary and continuous-relief diffractive optical elements (DOE) by direct laser writing and lithography are analyzed. Laser metrology often requires the precision forming of a probe laser beam. This problem is solved optimally by application of DOEs. A number of scientific and practical applications require the fabrication of DOEs to create highly accurate aspherical wavefronts. This paper reviews the research directed toward the creation of equipment and technologies for DOEs with a binary, multilevel, and continuous profile. The results of the practical applications of DOEs (fabricated in Institute of Automation and Electrometry SB RAS) in optical measuring systems are presented.

引用

页数：12

共 22 条

[1] Single-point diamond turning and replication of visible and near-infrared diffractive optical elements [J].

Blough, CG ;

Rossi, M ;

Mack, SK ;

Michaels, RL .

APPLIED OPTICS, 1997, 36 (20) :4648-4654

[2]

Burge J. H., 1999, OSA TRENDS OPTICS PH, V24, P182

[3]

Cherkashin V., 1996, P SOC PHOTO-OPT INS, V2723, P261

[4] Fabrication of gray-scale masks and diffractive optical elements with LDW-glass [J].

Korolkov, V ;

Malyshev, A ;

Poleschuk, A ;

Cherkashin, V ;

Tiziani, HJ ;

Pruss, C ;

Schoder, T ;

Westhauser, J ;

Wu, C .

LITHOGRAPHIC AND MICROMACHINING TECHNIQUES FOR OPTICAL COMPONENT FABRICATION, 2001, 4440 :73-84

[5] Optimization for direct laser writing of continuous-relief diffractive optical elements [J].

Korolkov, V. P. ;

Nasyrov, R. K. ;

Shimansky, R. V. .

INTERNATIONAL CONFERENCE ON LASERS, APPLICATIONS, AND TECHNOLOGIES 2007: LASER-ASSISTED MICRO- AND NANOTECHNOLOGIES, 2007, 6732

[6]

Korolkov V. P., 2007, P SPIE, V6732

[7]

KORONKEVICH VP, 1985, KVANTOVAYA ELEKTRON+, V12, P755

[8]

Nasyrov R. K., 2010, OPTICAL FABRICATION

[9] ONE-STEP 3D SHAPING USING A GRAY-TONE MASK FOR OPTICAL AND MICROELECTRONIC APPLICATIONS [J].

OPPLIGER, Y ;

SIXT, P ;

STAUFFER, JM ;

MAYOR, JM ;

REGNAULT, P ;

VOIRIN, G .

MICROELECTRONIC ENGINEERING, 1994, 23 (1-4) :449-454

[10]

Poleschuk A. G., 1987, P 5 NAT C LAS OPT LE, P270

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