The characterization of fluorine doped tin oxide films by Fourier Transformation Infrared spectrum

被引:17
作者
Zhang, B. [1 ,2 ]
Tian, Y. [1 ]
Zhang, J. X. [1 ,2 ]
Cai, W. [2 ]
机构
[1] Shandong Univ, Sch Mat Sci & Engn, Jinan 250061, Shandong, Peoples R China
[2] Harbin Inst Technol, Sch Mat Sci & Engn, Harbin 150001, Peoples R China
关键词
Thin films; Defects; Spray pyrolysis; Plasma frequency; THIN-FILMS; ELECTRICAL-PROPERTIES; OPTICAL-PROPERTIES;
D O I
10.1016/j.matlet.2010.08.065
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
SnO2 films, both undoped and doped with fluorine were prepared by spray pyrolysis technique. The FTIR spectrum was employed to investigate the oxygen vacancy and substitution of fluorine in SnO2 lattice. The feature of SnE2 confirms the substitution of fluorine for oxygen. The result of substitution can be expressed as a defect model of SnOxF2 - 4x which serves as the donor of free electrons. The cutoff wavelength of reflectivity is calculated and confirms the rationality of SnOxF4 - x model for fluorine doped SnO2 film. The calculation indicates that the carrier concentration is a decisive role for the reflectivity of fluorine doped SnO2 film. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码:2707 / 2709
页数:3
相关论文
共 19 条
[1]   Transparent conducting Zn1-xMgxO:(Al,In) thin films [J].
Cohen, DJ ;
Ruthe, KC ;
Barnett, SA .
JOURNAL OF APPLIED PHYSICS, 2004, 96 (01) :459-467
[2]   Characterization of transparent conducting oxides [J].
Coutts, TJ ;
Young, DL ;
Li, XN .
MRS BULLETIN, 2000, 25 (08) :58-65
[3]  
Drude P., 1900, ANN PHYS-BERLIN, V308, P369, DOI [DOI 10.1002/ANDP.19003081102, 10.1002/andp.19003081102]
[4]   A study on low cost-high conducting fluorine and antimony-doped tin oxide thin films [J].
Elangovan, E ;
Ramamurthi, K .
APPLIED SURFACE SCIENCE, 2005, 249 (1-4) :183-196
[5]   Studies on structural and electrical properties of spray deposited SnO2:F thin films as a function of film thickness [J].
Elangovan, E ;
Singh, MP ;
Ramamurthi, K .
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2004, 113 (02) :143-148
[6]   Studies on the structural and electrical properties of spray deposited SnO2:Sb thin films as a function of substrate temperature [J].
Elangovan, E ;
Ramesh, K ;
Ramamurthi, K .
SOLID STATE COMMUNICATIONS, 2004, 130 (08) :523-527
[7]   Studies on optical properties of polycrystalline SnO2:Sb thin films prepared using SnCl2 precursor [J].
Elangovan, E ;
Ramamurthi, K .
CRYSTAL RESEARCH AND TECHNOLOGY, 2003, 38 (09) :779-784
[8]   HIGH-QUALITY TRANSPARENT HEAT REFLECTORS OF REACTIVELY EVAPORATED INDIUM TIN OXIDE [J].
HAMBERG, I ;
HJORTSBERG, A ;
GRANQVIST, CG .
APPLIED PHYSICS LETTERS, 1982, 40 (05) :362-364
[9]   The peculiarities of fluoride glass structure. Spectroscopic study [J].
Ignatieva, L. N. ;
Surovtsev, N. V. ;
Plotnichenko, V. G. ;
Koltachev, V. V. ;
Merkulov, E. B. ;
Polyshchuk, S. A. ;
Bouznik, V. M. .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 2007, 353 (13-15) :1238-1242
[10]   Structure and thermal properties of transparent conductive nanoporous F:SnO2 films [J].
Kuantama, Endrowednes ;
Han, Deok-Woo ;
Sung, Youl-Moon ;
Song, Jae-Eun ;
Han, Chi-Hwan .
THIN SOLID FILMS, 2009, 517 (14) :4211-4214