Microscale thermal fluid transport process in a microchannel integrated with arrays of temperature and pressure sensors

One of the most important components in a microfluidic system is the microchannel which involves complicated flow and transport process. This work presents microscale thermal fluid transport process inside a microchannel with a height of 37 mu m. The channel can be heated on the bottom wall and is integrated with arrays of pressure and temperature sensors which can be used to measure and determine the local heat transfer and pressure drop. A more simplified model with modification of Young's Modulus from the experimental test is used to design and fabricate the arrays of pressure sensors. Both the pressure sensors and the channel wall use polymer materials which greatly simplifies the fabrication process. In addition, the polymer materials have a very low thermal conductivity which significantly reduces the heat loss from the channel to the ambient that the local heat transfer can be accurately measured. The airflow in the microchannel can readily become compressible even at a very low Reynolds number condition. Therefore, simultaneous measurement of both the local pressure drop and the temperature on the heated wall are required to determine the local heat transfer. Comparison of the local heat transfer for a compressible airflow in microchannel is made with the theoretical prediction based on incompressible airflow in large scale channel. The comparison has clarified many of the conflicting results among different works.