Surface roughness of magnesium oxide buffer layers grown by inclined substrate deposition

被引：4

作者：

Koritala, RE ^{[1
]}

Ma, BH

Miller, DJ

Uprety, KK

Fisher, BL

Balachandran, U

机构：

[1] Argonne Natl Lab, Energy Technol Div, Argonne, IL 60439 USA

[2] Argonne Natl Lab, Mat Sci Div, Argonne, IL 60439 USA

来源：

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 2005年 / 15卷 / 02期

关键词：

buffer layers; inclined substrate deposition; roughness; superconducting films;

D O I：

10.1109/TASC.2005.848712

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Biaxially textured MgO films were grown by inclined substrate deposition (ISD) as template layers for YBa2Cu3O7-x (YBCO)-coated conductors. The surface roughness of films deposited at different angles and with varying thickness was examined by atomic force microscopy. Results were correlated with the texture, measured by X-ray diffraction, to determine the optimal thickness and deposition angle.

引用

页码：3031 / 3033

页数：3

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