Surface roughness of magnesium oxide buffer layers grown by inclined substrate deposition

被引：4
|
作者：
Koritala, RE [1 ]
Ma, BH
Miller, DJ
Uprety, KK
Fisher, BL
Balachandran, U
机构：
[1] Argonne Natl Lab, Energy Technol Div, Argonne, IL 60439 USA
[2] Argonne Natl Lab, Mat Sci Div, Argonne, IL 60439 USA
来源：
IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 2005年 / 15卷 / 02期
关键词：
buffer layers; inclined substrate deposition; roughness; superconducting films;
D O I：
10.1109/TASC.2005.848712
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Biaxially textured MgO films were grown by inclined substrate deposition (ISD) as template layers for YBa2Cu3O7-x (YBCO)-coated conductors. The surface roughness of films deposited at different angles and with varying thickness was examined by atomic force microscopy. Results were correlated with the texture, measured by X-ray diffraction, to determine the optimal thickness and deposition angle.
引用
收藏
页码：3031 / 3033
页数：3
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