Diffusing behavior of MoO3 on Al2O3 and SiO2 thin films

被引:11
|
作者
Xu, WM
Yan, JF
Wu, NZ [1 ]
Zhang, HX
Xie, YC
Tang, YQ
Zhu, YF
机构
[1] Peking Univ, Inst Chem Phys, State Key Lab Struct Chem Unstable Species, Beijing 100871, Peoples R China
[2] Tsing Hua Univ, Anal Ctr, Beijing 100084, Peoples R China
基金
中国国家自然科学基金;
关键词
molybnenum oxides; aluminum oxide; silicon oxides; diffusion and migration; X-ray photoelectron spectroscopy; secondary ion mass spectroscopy; synchrotron radiation photoelectron spectroscopy;
D O I
10.1016/S0039-6028(00)00847-5
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
By means of XPS, SIMS, synchrotron radiation excited total-reflection X-ray fluorescence, AES etc., the diffusion process of MoO3 on stable Al2O3 and SiO2 oxide thin films was investigated. After thermal treatment, MoO3 formed a monolayer or a submonolayer on the hat surface of the thin films. The diffusion capacity and the diffusion rate on these two kinds of films differ significantly. Besides the support used, several factors, such as the heating temperature, the heating time and the ambience influence the diffusion process. A possible explanation to all the phenomena is the combination of surface diffusion and transportation via gas phase. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:121 / 130
页数:10
相关论文
共 50 条
  • [21] Preparation and Characterization of Al2O3 Thin Films for Catalytic Activity Studies
    Atanasova, Genoveva
    Guergova, Desislava
    Stoychevz, Dimitar
    Radic, Nenad
    Grbic, Bosko
    Stefanov, Plamen
    NANOSTRUCTURED MATERIALS, THIN FILMS AND HARD COATINGS FOR ADVANCED APPLICATIONS, 2010, 159 : 91 - +
  • [22] Phase control of Al2O3 thin films grown at low temperatures
    Andersson, J. M.
    Wallin, E.
    Helmersson, U.
    Kreissig, U.
    Munger, E. P.
    THIN SOLID FILMS, 2006, 513 (1-2) : 57 - 59
  • [23] Electronic properties of thin films of laser-ablated Al2O3
    Mezzasalma, A. M.
    Mondio, G.
    Serafino, T.
    Caridi, F.
    Torrisi, L.
    APPLIED SURFACE SCIENCE, 2009, 255 (07) : 4123 - 4128
  • [24] Boron Emitter Passivation With Al2O3 and Al2O3/SiNx Stacks Using ALD Al2O3
    Richter, Armin
    Benick, Jan
    Hermle, Martin
    IEEE JOURNAL OF PHOTOVOLTAICS, 2013, 3 (01): : 236 - 245
  • [25] XPS characterization and optical properties of Si/SiO2, Si/Al2O3 and Si/MgO co-sputtered films
    Koshizaki, N
    Umehara, H
    Oyama, T
    THIN SOLID FILMS, 1998, 325 (1-2) : 130 - 136
  • [26] Growth of ultra-thin amorphous Al2O3 films on CoAl(100)
    Rose, V
    Podgursky, V
    Costina, I
    Franchy, R
    SURFACE SCIENCE, 2003, 541 (1-3) : 128 - 136
  • [27] Dielectric properties of DC reactive magnetron sputtered Al2O3 thin films
    Prasanna, S.
    Mohan, Rao G.
    Jayakumar, S.
    Kannan, M. D.
    Ganesan, V
    THIN SOLID FILMS, 2012, 520 (07) : 2689 - 2694
  • [28] Kinetics of formation of Al2O3 on aluminum thin films studied by electrical measurements
    Novelo, TE
    Ceh, O
    Pech-Canul, MA
    Oliva, AI
    BOLETIN DE LA SOCIEDAD ESPANOLA DE CERAMICA Y VIDRIO, 2004, 43 (04): : 801 - 804
  • [29] Surface structure of ultra-thin Al2O3 films on metal substrates
    Lee, MB
    Lee, JH
    Frederick, BG
    Richardson, NV
    SURFACE SCIENCE, 2000, 448 (2-3) : L207 - L212
  • [30] Electrical insulation properties of sputter-deposited SiO2, Si3N4 and Al2O3 films at room temperature and 400 °C
    Bartzsch, Hagen
    Gloess, Daniel
    Frach, Peter
    Gittner, Matthias
    Schultheiss, Eberhard
    Brode, Wolfgang
    Hartung, Johannes
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2009, 206 (03): : 514 - 519