Influence of an Annealing Temperature in a Vacuum Atmosphere on the Physical Properties of Indium Tin Oxide Nanorod Films

被引：1

作者：

Charoenyuenyao, Peerasil ^{[1
]}

Promros, Nathaporn ^{[1
]}

Chaleawpong, Rawiwan ^{[1
]}

Noymaliwan, Pitoon ^{[1
]}

Borwornpornmetee, Nattakorn ^{[1
]}

Kamoldilok, Surachart ^{[1
]}

Porntheeraphat, Supanit ^{[2
]}

Saekow, Bunpot ^{[2
]}

Chaikeeree, Tanapoj ^{[3
]}

Samransuksamer, Benjarong ^{[4
]}

Nuchuay, Peerapong ^{[3
]}

Chananonnawathorn, Chanunthorn ^{[3
]}

Limwichean, Saksorn ^{[3
]}

Horprathum, Mati ^{[3
]}

Eiamchai, Pitak ^{[3
]}

Patthanasettakul, Viyapol ^{[3
]}

机构：

[1] King Mongkuts Inst Technol Ladkrabang, Fac Sci, Dept Phys, Bangkok 10520, Thailand

[2] Natl Elect & Comp Technol Ctr NECTEC, Photon Technol Lab, Pathum Thani 12120, Thailand

[3] Natl Elect & Comp Technol Ctr NECTEC, Opt Thin Film Lab, Pathum Thani 12120, Thailand

[4] King Mongkuts Univ Technol Thonburi, Fac Sci, Dept Phys, Bangkok 10140, Thailand

来源：

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | 2020年 / 20卷 / 08期

关键词：

ITO Nanorod Films; Vacuum Annealing; Ion-Assisted Electron-Beam Evaporation; Glancing Angle Deposition; Physical Properties; ELECTRON-BEAM EVAPORATION; ITO THIN-FILMS; OPTICAL-PROPERTIES; LIGHT-EXTRACTION; ENHANCEMENT; SURFACE; DEPOSITION; ZNO; TRANSMISSION; WETTABILITY;

D O I：

10.1166/jnn.2020.17840

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

In the present study, indium tin oxide (ITO) nanorod films were produced by usage of ion-assisted electron-beam evaporation with a glancing angle deposition technique. The as-produced ITO nanorod films were annealed in the temperature range of 100-500 degrees C for two hours in a vacuum atmosphere. The as-produced ITO nanorod films exhibited (222) and (611) preferred orientations from the X-ray diffraction pattern. After vacuum annealing at 500 degrees C, the ITO nanorod films demonstrated many preferred orientations and the improvement of film crystallinity. The sheet resistance of the as-produced ITO nanorod films was 11.92 Omega/square and was found to be 13.63 Omega/square by annealing at 500 degrees C. The as-produced and annealed ITO nanorod films had a rod diameter of around 80 nm and transmittance in a visible zone of around 90%. The root mean square roughness of the as-produced ITO nanorod film's surface was 5.49 nm, which increased to 13.77 nm at an annealing temperature of 500 degrees C. The contact angle of the as-produced ITO nanorod films was 110.9 degrees and increased to 116.5 degrees after annealing at 500 degrees C.

引用

页码：5006 / 5013

页数：8

共 46 条

[1] Enhanced photovoltaic device performance upon modification of indium tin oxide coated glass by liquid nitrogen treatment [J].

Afre, Rakesh A. ;

Hayashi, Yasuhiko ;

Soga, Tetsuo .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2009, 42 (04)

[2] Effect of post-annealing treatment on the wetting, optical and structural properties of Ag/Indium tin oxide thin films prepared by electron beam evaporation technique [J].

Azizian-Kalandaragh, Yashar ;

Nouhi, Sima ;

Amiri, Mandana .

MATERIALS EXPRESS, 2015, 5 (02) :137-145

[3] Thin films engineering of indium tin oxide:: Large area flat panel displays application [J].

Betz, U ;

Olsson, MK ;

Marthy, J ;

Escolá, MF ;

Atamny, F .

SURFACE & COATINGS TECHNOLOGY, 2006, 200 (20-21) :5751-5759

[4] Wettability of porous surfaces. [J].

Cassie, ABD ;

Baxter, S .

TRANSACTIONS OF THE FARADAY SOCIETY, 1944, 40 :0546-0550

[5] A modified transparent conducting oxide for flat panel displays only [J].

Chae, GS .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (3A) :1282-1286

[6] Enhanced transmission based on vertically aligned ITO NRs deposited by Ion assisted electron beam evaporation with glancing angle deposition technique [J].

Chaikeeree, T. ;

Nuchuay, P. ;

Kasayapanand, N. ;

Mungkung, N. ;

Arunrungrusmi, S. ;

Horprathum, M. ;

Eiamchai, P. ;

Limwichean, S. ;

Patthanasettakul, V. ;

Nuntawong, N. ;

Oros, C. ;

Denchitcharoen, S. ;

Samransuksamer, B. ;

Chindaudom, P. .

MATERIALS TODAY-PROCEEDINGS, 2017, 4 (05) :6060-6064

[7] The Effect of Annealing on Nanothick Indium Tin Oxide Transparent Conductive Films for Touch Sensors [J].

Chan, Shih-Hao ;

Li, Meng-Chi ;

Wei, Hung-Sen ;

Chen, Sheng-Hui ;

Kuo, Chien-Cheng .

JOURNAL OF NANOMATERIALS, 2015, 2015

[8] Oblique electron-beam evaporation of distinctive indium-tin-oxide nanorods for enhanced light extraction from InGaN/GaN light emitting diodes [J].

Chiu, C. H. ;

Yu, Peichen ;

Chang, C. H. ;

Yang, C. S. ;

Hsu, M. H. ;

Kuo, H. C. ;

Tsai, M. A. .

OPTICS EXPRESS, 2009, 17 (23) :21250-21256

[9] Ellipsometry investigation of the effects of annealing temperature on the optical properties of indium tin oxide thin films studied by Drude-Lorentz model [J].

D'Elia, Stefano ;

Scaramuzza, Nicola ;

Ciuchi, Federica ;

Versace, Carlo ;

Strangi, Giuseppe ;

Bartolino, Roberto .

APPLIED SURFACE SCIENCE, 2009, 255 (16) :7203-7211

[10] Hydrophilic and superhydrophilic surfaces and materials [J].

Drelich, Jaroslaw ;

Chibowski, Emil ;

Meng, Dennis Desheng ;

Terpilowski, Konrad .

SOFT MATTER, 2011, 7 (21) :9804-9828

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