Simulation study of InAlN/GaN high-electron mobility transistor with AlInN back barrier

被引:21
作者
Han, Tie-Cheng [1 ]
Zhao, Hong-Dong [1 ]
Yang, Lei [1 ]
Wang, Yang [1 ]
机构
[1] Hebei Univ Technol, Sch Elect & Informat Engn, Tianjin 300401, Peoples R China
关键词
InAlN/GaN HEMT; back barrier; electron confinement; short-channel effect (SCE); DOUBLE-HETEROSTRUCTURE; INALN/ALN/GAN HEMTS; ALGAN/GAN HEMTS; ENHANCEMENT; CONFINEMENT;
D O I
10.1088/1674-1056/26/10/107301
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
In this work, we use a 3-nm-thick Al0.64In0.36N back-barrier layer in In0.17Al0.83N/GaN high-electron mobility transistor (HEMT) to enhance electron confinement. Based on two-dimensional device simulations, the influences of Al0.64In0.36N back-barrier on the direct-current (DC) and radio-frequency (RF) characteristics of InAlN/GaN HEMT are investigated, theoretically. It is shown that an effective conduction band discontinuity of approximately 0.5 eV is created by the 3-nm-thick Al0.64In0.36N back-barrier and no parasitic electron channel is formed. Comparing with the conventional InAlN/GaN HEMT, the electron confinement of the back-barrier HEMT is significantly improved, which allows a good immunity to short-channel effect (SCE) for gate length decreasing down to 60 nm (9-nm top barrier). For a 70-nm gate length, the peak current gain cut-off frequency (f(T)) and power gain cut-off frequency (f(max)) of the back-barrier HEMT are 172 GHz and 217 GHz, respectively, which are higher than those of the conventional HEMT with the same gate length.
引用
收藏
页数:5
相关论文
共 26 条
[1]   Pyroelectric properties of Al(In)GaN/GaN hetero- and quantum well structures [J].
Ambacher, O ;
Majewski, J ;
Miskys, C ;
Link, A ;
Hermann, M ;
Eickhoff, M ;
Stutzmann, M ;
Bernardini, F ;
Fiorentini, V ;
Tilak, V ;
Schaff, B ;
Eastman, LF .
JOURNAL OF PHYSICS-CONDENSED MATTER, 2002, 14 (13) :3399-3434
[2]   Punchthrough-Voltage Enhancement of AlGaN/GaN HEMTs Using AlGaN Double-Heterojunction Confinement [J].
Bahat-Treidel, Eldad ;
Hilt, Oliver ;
Brunner, Frank ;
Wuerfl, Joachim ;
Traenkle, Guenther .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2008, 55 (12) :3354-3359
[3]   Two-dimensional electron gas density in Al1-xInxN/AlN/GaN heterostructures (0.03≤x≤0.23) [J].
Gonschorek, M. ;
Carlin, J. -F. ;
Feltin, E. ;
Py, M. A. ;
Grandjean, N. ;
Darakchieva, V. ;
Monemar, B. ;
Lorenz, M. ;
Ramm, G. .
JOURNAL OF APPLIED PHYSICS, 2008, 103 (09)
[4]   70-nm-gated InAlN/GaN HEMTs grown on SiC substrate with f(T)/f(max) > 160 GHz [J].
Han Tingting ;
Dun Shaobo ;
Lu Yuanjie ;
Gu Guodong ;
Song Xubo ;
Wang Yuangang ;
Xu Peng ;
Feng Zhihong .
JOURNAL OF SEMICONDUCTORS, 2016, 37 (02)
[5]   GaN high electron mobility transistors with AlInN back barriers [J].
He, X. G. ;
Zhao, D. G. ;
Jiang, D. S. ;
Zhu, J. J. ;
Chen, P. ;
Liu, Z. S. ;
Le, L. C. ;
Yang, J. ;
Li, X. J. ;
Liu, J. P. ;
Zhang, L. Q. ;
Yang, H. .
JOURNAL OF ALLOYS AND COMPOUNDS, 2016, 662 :16-19
[6]   Formation of two-dimensional electron gas at AlGaN/GaN heterostructure and the derivation of its sheet density expression [J].
He Xiao-Guang ;
Zhao De-Gang ;
Jiang De-Sheng .
CHINESE PHYSICS B, 2015, 24 (06)
[7]   Suppression of Current Collapse in Enhancement Mode GaN-Based HEMTs Using an AIGaN/GaN/AIGaN Double Heterostructure [J].
Ho, Shin-Yi ;
Lee, Chun-Hsun ;
Tzou, An-Jye ;
Kuo, Hao-Chung ;
Wu, Yuh-Renn ;
Huang, JianJang .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2017, 64 (04) :1505-1510
[8]   Short-channel effect limitations on high-frequency operation of AlGaN/GaN HEMTs for T-Gate devices [J].
Jessen, Gregg H. ;
Fitch, Robert C., Jr. ;
Gillespie, James K. ;
Via, Glen ;
Crespo, Antonio ;
Langley, Derrick ;
Denninghoff, Daniel J. ;
Trejo, Manuel, Jr. ;
Heller, Eric R. .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2007, 54 (10) :2589-2597
[9]   Double-Channel AlGaN/GaN High Electron Mobility Transistor With Back Barriers [J].
Kamath, A. ;
Patil, T. ;
Adari, R. ;
Bhattacharya, I. ;
Ganguly, S. ;
Aldhaheri, R. W. ;
Hussain, M. A. ;
Saha, Dipankar .
IEEE ELECTRON DEVICE LETTERS, 2012, 33 (12) :1690-1692
[10]   300-GHz InAlN/GaN HEMTs With InGaN Back Barrier [J].
Lee, Dong Seup ;
Gao, Xiang ;
Guo, Shiping ;
Kopp, David ;
Fay, Patrick ;
Palacios, Tomas .
IEEE ELECTRON DEVICE LETTERS, 2011, 32 (11) :1525-1527