MEMS earthworm: a thermally actuated peristaltic linear micromotor

被引:10
|
作者
Arthur, Craig [1 ]
Ellerington, Neil [1 ]
Hubbard, Ted [1 ]
Kujath, Marek [1 ]
机构
[1] Dalhousie Univ, Dept Mech Engn, Halifax, NS B3J 2X4, Canada
基金
加拿大自然科学与工程研究理事会;
关键词
LARGE-FORCE; MOTOR; LOCOMOTION; DESIGN; DRIVEN; MOTION;
D O I
10.1088/0960-1317/21/3/035022
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper examines the design, fabrication and testing of a bio-mimetic MEMS (micro-electro mechanical systems) earthworm motor with external actuators. The motor consists of a passive mobile shuttle with two flexible diamond-shaped segments; each segment is independently squeezed by a pair of stationary chevron-shaped thermal actuators. Applying a specific sequence of squeezes to the earthworm segments, the shuttle can be driven backward or forward. Unlike existing inchworm drives that use clamping and thrusting actuators, the earthworm actuators apply only clamping forces to the shuttle, and lateral thrust is produced by the shuttle's compliant geometry. The earthworm assembly is fabricated using the PolyMUMPs process with planar dimensions of 400 mu m width by 800 mu m length. The stationary actuators operate within the range of 4-9 V and provide a maximum shuttle range of motion of 350 mu m (approximately half its size), a maximum shuttle speed of 17 mm s(-1) at 10 kHz, and a maximum dc shuttle force of 80 mu N. The shuttle speed was found to vary linearly with both input voltage and input frequency. The shuttle force was found to vary linearly with the actuator voltage.
引用
收藏
页数:15
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