A New Stitching Method for Dark-Field Surface Defects Inspection Based on Simplified Target-Tracking and Path Correction

被引：18
作者：
Chen, Xue [1 ,2 ,3 ]
Li, Jiaqi [1 ,2 ,3 ]
Sui, Yongxin [1 ,3 ]
机构：
[1] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, Changchun 130033, Peoples R China
[2] Univ Chinese Acad Sci, Daheng Coll, Beijing 100049, Peoples R China
[3] Changchun Natl Extreme Precis Opt Co Ltd, Changchun 130033, Peoples R China
来源：
SENSORS | 2020年 / 20卷 / 02期
关键词：
defect inspection; dark-field imaging; image stitching; target tracking; scanning path correction; EVALUATION SYSTEM; OPTICAL-SURFACES;
D O I：
10.3390/s20020448
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
A camera-based dark-field imaging system can effectively detect defects of microns on large optics by scanning and stitching sub-apertures with a small field of view. However, conventional stitching methods encounter problems of mismatches and location deviations, since few defects exist on the tested fine surface. In this paper, a highly efficient stitching method is proposed, based on a simplified target-tracking and adaptive scanning path correction. By increasing the number of sub-apertures and switching to camera perspective, the defects can be regarded as moving targets. A target-tracking procedure is firstly performed to obtain the marked targets. Then, the scanning path is corrected by minimizing the sum of deviations. The final stitching results are updated by re-using the target-tracking method. An experiment was carried out on an inspection of our specially designed testing sample. Subsequently, 118 defects were identified out of 120 truly existing defects, without stitching mismatches. The experiment results show that this method can help to reduce mismatches and location deviations of defects, and it was also effective in increasing the detectability for weak defects.
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页数：19
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