Large-area microlens arrays fabricated on flexible polycarbonate sheets via single-step laser interference ablation

被引：21
|
作者：
Guo, Rui [1 ]
Yuan, Dajun [1 ]
Das, Suman [1 ]
机构：
[1] Georgia Inst Technol, Woodruff Sch Mech Engn, Atlanta, GA 30332 USA
来源：
JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2011年 / 21卷 / 01期
关键词：
LENS ARRAY; METROLOGY; GRATINGS; FILMS;
D O I：
10.1088/0960-1317/21/1/015010
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A single-step method for the fabrication of large-area microlens arrays on flexible polycarbonate sheets is described. On areas of approximately 1 cm(2), 17 million to 120 million microlenses ranging in size from sub-micrometer to several micrometers are fabricated via deep-UV pulsed laser interference ablation. The uniformity and surface quality of fabricated microlens arrays are examined and confirmed through atomic force microscopy and scanning electron microscopy. Optical imaging performance of the microlenses, and their use in massively parallel, pulsed laser nanofabrication on silicon is demonstrated. The microlens arrays can be fabricated in a matter of seconds, suggesting the potential for fast and low-cost production on flexible plastic substrates.
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页数：6
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