Study on mechanical and electro-optical properties of ITO/CeO2 films deposited on PI substrate for flexible organic solar cells

被引：6
作者：
Kang, Yong Min [1 ]
Kwon, Se Hee [1 ]
Song, Pung Keun [1 ]
机构：
[1] Pusan Natl Univ, Dept Mat Sci & Engn, Pusan 609735, South Korea
来源：
CURRENT APPLIED PHYSICS | 2010年 / 10卷 / 03期
关键词：
Indium tin oxide; Hybrid sputtering system; CeO2 buffer layer; Bending test; ITO; PERFORMANCE;
D O I：
10.1016/j.cap.2010.02.039
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
ITO and ITO/CeO2 films with various CeO2 buffer layer thickness were deposited on flexible polyimide substrates by DC and RF magnetron bi-sputtering at 200 degrees C. The crystallinity of the ITO/CeO2 films increased remarkably with increasing CeO2 thickness from 0 to 7 nm and the ITO/CeO2 films showed a single (2 2 2)-oriented highly preferred structure. The resistivity of the ITO/ CeO2 films decreased with increasing CeO2 buffer layer thickness due to the increase in crystallinity. The minimum resistivity of the ITO/ CeO2 film, 7 nm in thickness, was 2.84 x 10(-4) Omega cm. A relatively small change in resistance in dynamic stress mode was observed for the ITO/ CeO2 film with a buffer layer thickness of 3 nm. (C) 2010 Elsevier B. V. All rights reserved.
引用
收藏
页码：S491 / S494
页数：4
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