Discontinuous surface measurement by wavelength-tuning interferometry with the excess fraction method correcting scanning nonlinearity

被引：17

作者：

Hibino, Kenichi ^{[1
]}

Tani, Yosuke ^{[2
]}

Bitou, Youichi ^{[1
]}

Takatsuji, Toshiyuki ^{[1
]}

Warisawa, Shinichi ^{[2
]}

Mitsuishi, Mamoru ^{[2
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058564, Japan

[2] Univ Tokyo, Bunkyo Ku, Tokyo 1138656, Japan

来源：

APPLIED OPTICS | 2011年 / 50卷 / 06期

关键词：

PHASE-SHIFTING INTERFEROMETRY; 2-WAVELENGTH; TIME;

D O I：

10.1364/AO.50.000962

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Wavelength-tuning interferometry can measure surface shapes with discontinuous steps using a unit of synthetic wavelength that is usually larger than the step height. However, measurement resolution decreases for large step heights since the synthetic wavelength becomes much larger than the source wavelength. The excess fraction method with a piezoelectric transducer phase shifting is applied to two-dimensional surface shape measurements. Systematic errors caused by nonlinearity in source frequency scanning are fully corrected by a correlation analysis between the observed and calculated interference fringes. Experiment results demonstrate that the determination of absolute interference order gives the profile of a surface with a step height of 1 mm with an accuracy of 12 nm. (C) 2011 Optical Society of America

引用

页码：962 / 969

页数：8

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