Thin/thick piezoelectric films by electrophoretic deposition

被引：2

作者：

Van Tassel, J ^{[1
]}

Randall, CA ^{[1
]}

机构：

[1] Penn State Univ, Particulate Mat Ctr, Mat Res Lab, University Pk, PA 16801 USA

来源：

SMART STRUCTURES AND MATERIALS 1998: SMART MATERIALS TECHNOLOGIES | 1998年 / 3324卷

关键词：

PZT; piezoelectric films; electrophoretic deposition; thin/thick films;

D O I：

10.1117/12.316863

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

Electrophoretic deposition (EPD) is a simple, rapid, and low cost method for producing conformal films on patterned electrodes. This paper covers the use of EPD for forming fully dense Lead Zirconate Titanate (PZT) films of twenty microns and less. The three main steps of this process as applied to PZT are covered: 1. Formation of a charged suspension of the starting sub-micron PZT powder, 2. Deposition of the powder particles on an electrode under the influence of a DC electric field, and 3. fluxing and constrained sintering of the resulting particulate deposit to form a dense continuous film. Using this process we have formed six to ten micron PZT films on an alumina substrate, sintered to full density at 900 degrees C. In a fourteen micron film we have achieved a piezoelectric d(33) coefficient of 140 picoCoulombs/Newton, and a dielectric constant of 1,000 with a loss tan delta of 0.045.

引用

页码：14 / 19

页数：6