A DISTORTION-FREE SINGLE-CHIP ATOMIC FORCE MICROSCOPE WITH 2DOF ISOTHERMAL SCANNING

被引：0

作者：

Strathearn, D. ^{[1
,2
]}

Lee, G. ^{[1
,2
]}

Sarkar, N. ^{[1
,2
]}

Olfat, M. ^{[1
,2
]}

Mansour, R. R. ^{[1
,2
]}

机构：

[1] Univ Waterloo, Waterloo, ON, Canada

[2] ICSPI Corp, Waterloo, ON, Canada

来源：

2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2015年

关键词：

Single-chip; CMOS-MEMS; AFM; Atomic Force Microscope; Scanning Probe Microscope; SPM; nanopositioning; electrothermal actuator; isothermal; MEMS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A distortion free single-chip scanning probe microscope (sc-SPM) has been developed. The reported design integrates the 3 DOF scanner, sensors, and tip that are required for nanometer-scale measurements onto a single chip. This low-cost instrument has achieved imaging resolution comparable to conventional tools without the image distortion that was present in prior single-chip SPMs, arising from thermal coupling between electrothermal actuators. A single chip atomic force microscope is used with a novel 2D isothermal scanning algorithm to obtain a 5 mu m x 3 mu m rectangular topographical map, free from image distortion.

引用

页码：2113 / 2116

页数：4

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