A Thin Film Pressure Sensor with Double Sensitive Units

被引：0

作者：

Pan, Hongqing ^{[1
]}

Hu, Guangyu ^{[1
]}

Cao, Pingguo ^{[1
]}

Wang, Yubing ^{[1
]}

Ge, Yunjian ^{[1
]}

Shuang, Feng ^{[1
]}

机构：

[1] Chinese Acad Sci, Inst Intelligent Machines, Hefei 230031, Peoples R China

来源：

2015 IEEE INTERNATIONAL CONFERENCE ON INFORMATION AND AUTOMATION | 2015年

关键词：

Pressure sensor; Thin film capacitor; Microstructured film; Tactile sensor;

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

The paper expresses two strategies for improving the sensitivity of capacitive pressure sensor. Microstructuring of dielectric elastomer surface can significantly increase capacitance response of the sensor due to raising permittivity and elasticity of dielectric. For the thin sensor, multi sensor units using stacked structure have multiplied effect in signal output.

引用

页码：2947 / 2948

页数：2

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