Mechanical and thermal properties of nanomaterials at sub-50nm dimensions characterized using coherent EUV beams

被引：2

作者：

Hoogeboom-Pot, Kathleen ^{[1
,2
,3
]}

Hernandez-Charpak, Jorge ^{[1
,2
,3
]}

Frazer, Travis ^{[1
,2
,3
]}

Gu, Xiaokun ^{[4
]}

Turgut, Emrah ^{[1
,2
,3
]}

Anderson, Erik ^{[5
]}

Chao, Weilun ^{[5
]}

Shaw, Justin ^{[6
]}

Yang, Ronggui ^{[4
]}

Murnane, Margaret ^{[1
,2
,3
]}

Kapteyn, Henry ^{[1
,2
,3
]}

Nardi, Damiano ^{[1
,2
,3
]}

机构：

[1] Univ Colorado, JILA, Boulder, CO 80309 USA

[2] Univ Colorado, Dept Phys, Boulder, CO 80309 USA

[3] NIST, Boulder, CO 80309 USA

[4] Univ Colorado, Dept Mech Engn, Boulder, CO 80309 USA

[5] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Ctr Xray Opt, Berkeley, CA 94720 USA

[6] NIST, Electromagnet Div, Boulder, CO 80305 USA

来源：

METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXIX | 2015年 / 9424卷

关键词：

Ultrafast X-Rays; nanometrology; nano-mechanical properties; ultrathin films; nondiffusive thermal transport; mean free path spectroscopy; photoacoustic; photothermal; SCATTERING;

D O I：

10.1117/12.2085615

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Coherent extreme ultraviolet beams from tabletop high harmonic generation offer several revolutionary capabilities for observing nanoscale systems on their intrinsic length and time scales. By launching and monitoring hypersonic acoustic waves in such systems, we characterize the mechanical properties of sub-10nm layers and find that the material densities remain close to their bulk values while their elastic properties are significantly modified. Moreover, within the same measurement, by following the heat dissipation dynamics from 30-750nm-wide nanowires, we uncover a new thermal transport regime in which closely-spaced nanoscale heat sources can surprisingly cool more efficiently than widely-spaced heat sources of the same size.

引用

页数：8

共 28 条

[1] Application of the picosecond ultrasonic technique to the study of elastic and time-resolved thermal properties of materials [J].

Bonello, B ;

Perrin, B ;

Romatet, E ;

Jeannet, JC .

ULTRASONICS, 1997, 35 (03) :223-231

[2] BRILLOUIN-SCATTERING BY SURFACE ACOUSTIC MODES FOR ELASTIC CHARACTERIZATION OF ZNO FILMS [J].

CARLOTTI, G ;

FIORETTO, D ;

PALMIERI, L ;

SOCINO, G ;

VERDINI, L ;

VERONA, E .

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1991, 38 (01) :56-61

[3] Surface tension effect on the mechanical properties of nanomaterials measured by atomic force microscopy -: art. no. 165410 [J].

Cuenot, S ;

Frétigny, C ;

Demoustier-Champagne, S ;

Nysten, B .

PHYSICAL REVIEW B, 2004, 69 (16) :165410-1

[4] Heat transport in silicon from first-principles calculations [J].

Esfarjani, Keivan ;

Chen, Gang ;

Stokes, Harold T. .

PHYSICAL REVIEW B, 2011, 84 (08)

[5] Thickness dependence of nanofilm elastic modulus [J].

Fedorchenko, Alexander I. ;

Wang, An-Bang ;

Cheng, Henry H. .

APPLIED PHYSICS LETTERS, 2009, 94 (15)

[6] Molecular dynamics study on size-dependent elastic properties of silicon nanoplates [J].

Gong, Baoming ;

Chen, Qiang ;

Wang, Dongpo .

MATERIALS LETTERS, 2012, 67 (01) :165-168

[7] PICOSECOND ULTRASONICS [J].

GRAHN, HT ;

MARIS, HJ ;

TAUC, J .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1989, 25 (12) :2562-2569

[8]

Hoogeboom-Pot K., 2014, ARXIV14070658

[9]

Hoogeboom-Pot K., 2015, NEW REGIME THERMAL T, V162, P341

[10] Direct Measurement of Room-Temperature Nondiffusive Thermal Transport Over Micron Distances in a Silicon Membrane [J].

Johnson, Jeremy A. ;

Maznev, A. A. ;

Cuffe, John ;

Eliason, Jeffrey K. ;

Minnich, Austin J. ;

Kehoe, Timothy ;

Sotomayor Torres, Clivia M. ;

Chen, Gang ;

Nelson, Keith A. .

PHYSICAL REVIEW LETTERS, 2013, 110 (02)

← 1 2 3 →