MeV ion implantation for modification of electronic, optical, and magnetic materials

被引:1
作者
Roorda, S [1 ]
Schiettekatte, F [1 ]
Cai, M [1 ]
Veres, T [1 ]
Tchebotareva, A [1 ]
机构
[1] Univ Montreal, Dept Phys, Montreal, PQ H3C 3J7, Canada
来源
MATERIALS MODIFICATION BY ION IRRADIATION | 1998年 / 3413卷
关键词
ion implantation; optical materials; amorphous materials; magnetic materials; electronic materials;
D O I
10.1117/12.321945
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The University of Montreal recently inaugurated a new 1.7 MV Tandem accelerator for materials research. It is being used to study a wide range of topics involving optical, electronic, opto-electronic, and magnetic materials. Current research includes: threshold dose for secondary damage in Si, gettering of impurities in Si by nano-cavities, ion beam mixing of metallic multilayers probed by giant magnetoresistance, tracks and deformations induced by multi-MeV ion beams, and high-resolution radial distribution function of pure amorphous silicon. A selection of recent results is discussed.
引用
收藏
页码:165 / 173
页数:9
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