Surface Acoustic Wave Sensor with Pd/ZnO Bilayer Structure for Room Temperature Hydrogen Detection

被引：43

作者：

Viespe, Cristian ^{[1
]}

Miu, Dana ^{[1
]}

机构：

[1] Natl Inst Laser Plasma & Radiat Phys, Laser Dept, Atomistilor 409, Bucharest 077125, Romania

来源：

SENSORS | 2017年 / 17卷 / 07期

关键词：

SAW sensor; hydrogen sensor; bilayer; pulsed laser deposition; nanoporous film; Palladium; ZnO; ZINC-OXIDE SURFACE; CONDUCTIVITY CHANGES; GAS SENSORS; SAW; FILMS; NANOSTRUCTURES; PALLADIUM; PD; SYSTEMS; LAYER;

D O I：

10.3390/s17071529

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A Surface Acoustic Wave (SAW) hydrogen sensor with a Pd/ZnO bilayer structure for room temperature sensing operation has been obtained by Pulsed Laser Deposition (PLD). The sensor structure combines a Pd layer with optimized porosity for maximizing mass effects, with the large acoustoelectric effect at the Pd/ZnO interface. The large acoustoelectric effect is due to the fact that ZnO has a surface conductivity which is highly sensitive to chemisorbed gases. The sensitivity of the sensor was determined for hydrogen concentrations between 0.2% and 2%. The limit of detection (LOD) of the bilayer sensor was about 4.5 times better than the single ZnO films and almost twice better than single Pd films.

引用

页数：9

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