Mechanical properties of TiC/metal multilayers synthesized by ion beam sputtering technique

Artificially modulated TiC and a series of metals with modulation wavelength lambda from 1.8 to 25.0 nm and the metallic content fraction from 10 to 50 vol% were prepared by ion beam sputtering technique at ambient temperature. Low-angle x-ray diffraction and x-ray diffraction were used to analyze their periodicity and structural properties. Tt was found that sharp interfaces were formed between individual layers. With the modulation parameters properly adjusted, the multilayer was even harder than its hard component (TiC). The maximum hardness of the multilayers was about a 120% enhancement above the rule-of-mixture values of TiC/Cr multilayers, and was achieved at lambda =9.0 nm, with the metallic content of 50%. The possible mechanism for hardening is discussed. (C) 2001 American Vacuum Society.