Study of bake mechanisms by real-time in-situ ellipsometry

被引：29
|
作者：
Paniez, PJ [1 ]
Vareille, A [1 ]
Ballet, P [1 ]
Mortini, B [1 ]
机构：
[1] France Telecom, CNET Grenoble, F-38243 Meylan, France
来源：
ADVANCES IN RESIST TECHNOLOGY AND PROCESSING XV, PTS 1 AND 2 | 1998年 / 3333卷
关键词：
resist; polymer; bake; film formation; in-situ ellipsometry; relaxation; compaction;
D O I：
10.1117/12.312418
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Film formation and bake processes have been studied using in-situ ellipsometry. This new experimental set-up based on a HeNe laser mounted over a hot-plate is shown to be mainly sensitive to physical changes in the resist layer and provides real-time monitoring of the modifications induced during bake steps. Pure polymer films as well as DUV 248 nm and 193 nm CA resists are investigated.
引用
收藏
页码：289 / 300
页数：4
相关论文
共 50 条
  • [21] Injectable Hydrogels Exhibiting Real-Time In Situ Reinforcement under Dynamic Mechanical Conditions
    Du, Wei
    Ji, Weijun
    Jiao, Zewen
    Li, Sidi
    Li, Xueping
    Zhao, Jin
    Hou, Xin
    Yuan, Xubo
    ACS APPLIED POLYMER MATERIALS, 2025,
  • [22] Real-time Raman spectroscopy measurements to study the uniaxial tension of isotactic polypropylene: a global overview of microstructural deformation mechanisms
    Martin, J.
    Poncot, M.
    Hiver, J. M.
    Bourson, P.
    Dahoun, A.
    JOURNAL OF RAMAN SPECTROSCOPY, 2013, 44 (05) : 776 - 784
  • [23] Application of in-situ ellipsometry to the fabrication of multi-layer optical coatings with sub-nanometre accuracy
    Dligatch, S
    Netterfield, RP
    Martin, B
    THIN SOLID FILMS, 2004, 455 : 376 - 379
  • [24] Real-Time Characterization Using in situ RHEED Transmission Mode and TEM for Investigation of the Growth Behaviour of Nanomaterials
    Jo, Janghyun
    Tchoe, Youngbin
    Yi, Gyu-Chul
    Kim, Miyoung
    SCIENTIFIC REPORTS, 2018, 8
  • [25] Crystalline composition of silicon deposited on a low-cost substrate for photovoltaic applications studied by in-situ spectroscopic ellipsometry
    Mrazkova, Z.
    Postava, K.
    Torres-Rios, A.
    Foldyna, M.
    Roca i Cabarrocas, P.
    Vodarek, V.
    Holesinsky, J.
    Vavra, I.
    Pistora, J.
    19TH POLISH-SLOVAK-CZECH OPTICAL CONFERENCE ON WAVE AND QUANTUM ASPECTS OF CONTEMPORARY OPTICS, 2014, 9441
  • [26] Study on real-time construction quality monitoring of storehouse surfaces for RCC dams
    Liu, Yuxi
    Zhong, Denghua
    Cui, Bo
    Zhong, Guiliang
    Wei, Yongxin
    AUTOMATION IN CONSTRUCTION, 2015, 49 : 100 - 112
  • [27] In Situ Surface Defect Detection in Polymer Tube Extrusion: AI-Based Real-Time Monitoring Approach
    Jo, Chun Muk
    Jang, Woong Ki
    Seo, Young Ho
    Kim, Byeong Hee
    SENSORS, 2024, 24 (06)
  • [28] Surface relaxation during plasma chemical vapor deposition of diamond-like carbon films, investigated by in-situ ellipsometry
    von Keudell, A
    Schwarz-Selinger, T
    Jacob, W
    THIN SOLID FILMS, 1997, 308 : 195 - 198
  • [29] Study of bake mechanisms in novolak based photoresist films: Investigation by contact angle measurements.
    Fadda, E
    Clarisse, C
    Paniez, PJ
    ADVANCES IN RESIST TECHNOLOGY AND PROCESSING XIII, 1996, 2724 : 460 - 468
  • [30] Raman-based real-time dissolution prediction using a deterministic permeation model
    Horkovics-Kovats, Stefan
    Galata, Dorian Laszlo
    Zlatos, Pavol
    Nagy, Brigitta
    Meszaros, Lilla Alexendra
    Nagy, Zsombor Kristof
    INTERNATIONAL JOURNAL OF PHARMACEUTICS, 2022, 617
12345