Corrosion resistance of TiN coatings produced by various dry processes

被引:42
作者
Morita, R
Azuma, K
Inoue, S
Miyano, R
Takikawa, H
Kobayashi, A
Fujiwara, E
Uchida, H
Yatsuzuka, M
机构
[1] Himeji Inst Technol, Himeji, Hyogo 6712201, Japan
[2] Toyohashi Univ Technol, Toyohashi, Aichi 4418580, Japan
[3] Osaka Univ, Ibaraki, Osaka 5670047, Japan
关键词
plasma-based ion implantation (PBII); titanium nitride (TiN); corrosion resistance; surface modification; plasma dry process;
D O I
10.1016/S0257-8972(00)01057-4
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The corrosion resistance of a TiN surface prepared by plasma-based ion implantation (PBII) was compared with that of TIN coating films prepared by sputtering deposition, plasma spraying, and shielded vacuum are deposition. The corrosion test with the potentiodynamic polarization curve shows that the PBII sample had the best corrosion resistance. The SEM observation indicates that there was no pinhole on the TiN surface prepared by PBII. However, a lot of pinholes were observed in the TiN coating films prepared by the other dry coating processes. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:207 / 210
页数:4
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