Relationship between sensitivity and waveguide position on diaphragm for silicon-based integrated optic pressure sensor

被引：0

作者：

Yamada, A ^{[1
]}

Shirai, Y ^{[1
]}

Goto, T ^{[1
]}

Ohkawa, M ^{[1
]}

Sekine, S ^{[1
]}

Sato, T ^{[1
]}

机构：

[1] Niigata Univ, Fac Engn, Niigata 9502181, Japan

来源：

CLEO(R)/PACIFIC RIM 2001, VOL I, TECHNICAL DIGEST | 2001年

关键词：

D O I：

暂无

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We have experimentally investigated how sensitivity is dependent on the position of a waveguide passing over a diaphragm in a silicon-based integrated optic pressure sensor based on the elasto-optic effect.

引用

页码：420 / 421

页数：2

共 50 条

[31] Characterization of a Functional Hydrogel Layer on a Silicon-Based Grating Waveguide for a Biochemical Sensor
Hong, Yoo-Seung
Kim, Jongseong
Sung, Hyuk-Kee
SENSORS, 2016, 16 (06):
[32] High-precision silicon-based integrated optical temperature sensor
Wang Yi-meng
Shu Hao-wen
Han Xiu-you
CHINESE OPTICS, 2021, 14 (06): : 1355 - 1361
[33] A Novel Silicon-Based LED Packaging Module With an Integrated Temperature Sensor
Chang, Shengwei
Tsou, Chingfu
IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY, 2014, 4 (05): : 769 - 776
[34] Silicon-based double fano resonances photonic integrated gas sensor
Salama, Norhan A.
Alexeree, Shaimaa M.
Obayya, Salah S. A.
Swillam, Mohamed A.
SCIENTIFIC REPORTS, 2024, 14 (01):
[35] Silicon-based Integrated Field Emission Electron Sources for Sensor Application
Schreiner, R.
Dams, F.
Prommesberger, C.
Bornmann, B.
Serbun, P.
Navitski, A.
Mueller, G.
2011 24TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE (IVNC), 2011, : 19 - +
[36] SILICON-BASED INTEGRATED-OPTICS TECHNOLOGY FOR OPTICAL SENSOR APPLICATIONS
VALETTE, S
RENARD, S
JADOT, JP
GIDON, P
ERBEIA, C
SENSORS AND ACTUATORS A-PHYSICAL, 1990, 23 (1-3) : 1087 - 1091
[37] Silicon-based integrated optical pressure sensor using intermodal interference between TM-like and TE-like modes
Shirai, Y
Goto, T
Ohkawa, M
Sekine, S
Sato, T
INTEGRATED OPTICS DEVICES V, 2001, 4277 : 411 - 418
[38] Miniaturized silicon-based substrate integrated waveguide filter for 6G applications
Wang, Fengjuan
Lu, Ying
Yin, Xiangkun
Liu, Jiangfan
Yu, Ningmei
Yang, Yuan
MICROELECTRONICS JOURNAL, 2023, 138
[39] 1.55 μm silicon-based reflection-type waveguide-integrated thermo-optic 2 x 2 switch
Rao, Sandro
Della Corte, Francesco G.
OPTIK, 2012, 123 (05): : 467 - 469
[40] Fully Reconfigurable Silicon-Based Waveguide Bragg Grating for Integrated Microwave Photonic Applications
Zhang, Weifeng
Yao, Jianping
2018 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXPOSITION (OFC), 2018,

← 1 2 3 4 5 →