Relationship between sensitivity and waveguide position on diaphragm for silicon-based integrated optic pressure sensor

被引：0

作者：

Yamada, A ^{[1
]}

Shirai, Y ^{[1
]}

Goto, T ^{[1
]}

Ohkawa, M ^{[1
]}

Sekine, S ^{[1
]}

Sato, T ^{[1
]}

机构：

[1] Niigata Univ, Fac Engn, Niigata 9502181, Japan

来源：

CLEO(R)/PACIFIC RIM 2001, VOL I, TECHNICAL DIGEST | 2001年

关键词：

D O I：

暂无

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We have experimentally investigated how sensitivity is dependent on the position of a waveguide passing over a diaphragm in a silicon-based integrated optic pressure sensor based on the elasto-optic effect.

引用

页码：420 / 421

页数：2

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