Relationship between sensitivity and waveguide position on diaphragm for silicon-based integrated optic pressure sensor

被引：0
|
作者：
Yamada, A [1 ]
Shirai, Y [1 ]
Goto, T [1 ]
Ohkawa, M [1 ]
Sekine, S [1 ]
Sato, T [1 ]
机构：
[1] Niigata Univ, Fac Engn, Niigata 9502181, Japan
来源：
CLEO(R)/PACIFIC RIM 2001, VOL I, TECHNICAL DIGEST | 2001年
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
We have experimentally investigated how sensitivity is dependent on the position of a waveguide passing over a diaphragm in a silicon-based integrated optic pressure sensor based on the elasto-optic effect.
引用
收藏
页码：420 / 421
页数：2
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