High efficient electric-discharge ArF and KrF excimer lasers with He as a buffer gas

被引：0
|
作者：
Razhev, AM [1 ]
Bagayev, SN [1 ]
Zhupikov, AA [1 ]
机构：
[1] Russian Acad Sci, Inst Laser Phys SD, Novosibirsk 630090, Russia
来源：
CLEO(R)/PACIFIC RIM 2001, VOL II, TECHNICAL DIGEST | 2001年
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
The modified high-voltage excitation circuit of LC-inverter type providing high specific pump power in a very short time interval has been created. The use of this scheme allowed achieving excellent results of radiation energy and efficiency for ArF and KrF excimer lasers Using He as a buffer gas.
引用
收藏
页码：62 / 63
页数：2
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