[1] Acad Sinica, Inst Chem, Taipei 11529, Taiwan
[2] Acad Sinica, Taiwan Int Grad Program, Sustainable Chem Sci & Technol, Taipei 11529, Taiwan
[3] Natl Yang Ming Chiao Tung Univ, Taipei 11529, Taiwan
[4] Natl Yang Ming Chiao Tung Univ, Dept Appl Chem, Hsinchu 30010, Taiwan
[5] Natl Cheng Kung Univ, Dept Chem, Tainan 70101, Taiwan
[6] Cabot Microelect, Aurora, IL 60504 USA
[7] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 30013, Taiwan
[8] Natl Taiwan Univ, Dept Chem, Taipei 10617, Taiwan
[9] Natl Synchrotron Radiat Res Ctr, Hsinchu 30076, Taiwan
[10] Natl Cent Univ, Inst Mat Sci & Engn, Taoyuan 32001, Taiwan