Development and Characterization of Three-axis Micro-force Sensor Series

This paper presents series three-axis micro-force sensors which are based on piezoresistive effect. The structure of these sensors include two critical parts, one central mesa suspended by four single-crystal-silicon sensing beam and one quartz optical fiber probe with ladder structure. By changing the length of the probe, we can get series sensors with different sensitivety and measurement range. The experiment results demonstrate that the linearity of these sensors is very good. These sensors will be used in many fields.