Development and Characterization of Three-axis Micro-force Sensor Series

被引：0
作者：
Qin, Yafei [1 ]
Zhao, Yulong [1 ]
Wang, Weizhong [1 ]
机构：
[1] Xi An Jiao Tong Univ, State Key Lab Mech Mfg Syst, Xian, Shannxi, Peoples R China
来源：
2015 IEEE 10TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS) | 2015年
关键词：
integrated sensor; micro-force; pressure;
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
This paper presents series three-axis micro-force sensors which are based on piezoresistive effect. The structure of these sensors include two critical parts, one central mesa suspended by four single-crystal-silicon sensing beam and one quartz optical fiber probe with ladder structure. By changing the length of the probe, we can get series sensors with different sensitivety and measurement range. The experiment results demonstrate that the linearity of these sensors is very good. These sensors will be used in many fields.
引用
收藏
页码：103 / 106
页数：4
相关论文
共 13 条
  • [1] A Six-Axis MEMS Force-Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution
    Beyeler, Felix
    Muntwyler, Simon
    Nelson, Bradley J.
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2009, 18 (02) : 433 - 441
  • [2] Development of tactile sensors for simultaneous, detection of normal and shear stresses
    Huang, Yu-Ming
    Tsai, Nan-Chyuan
    Lai, Jing-Yao
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 2010, 159 (02) : 189 - 195
  • [3] A NEW FORCE SENSOR INCORPORATING FORCE-FEEDBACK CONTROL FOR INTERFACIAL FORCE MICROSCOPY
    JOYCE, SA
    HOUSTON, JE
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1991, 62 (03) : 710 - 715
  • [4] Simultaneous normal and torsional force measurement by cantilever surface contour analysis
    Kumanchik, Lee
    Schmitz, Tony
    Pratt, Jon
    [J]. MEASUREMENT SCIENCE AND TECHNOLOGY, 2011, 22 (05)
  • [5] Design and fabrication of a flexible three-axial tactile sensor array based on polyimide micromachining
    Kwon, Hyun-Jun
    Choi, Woo-Chang
    [J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2010, 16 (12): : 2029 - 2035
  • [6] A novel piezoelectric 6-component heavy force/moment sensor for huge heavy-load manipulator's gripper
    Li, Ying-Jun
    Zhang, Jun
    Jia, Zhen-Yuan
    Qian, Min
    [J]. MECHANICAL SYSTEMS AND SIGNAL PROCESSING, 2009, 23 (05) : 1644 - 1651
  • [7] Miniature robust five-dimensional fingertip force/torque sensor with high performance
    Liang, Qiaokang
    Zhang, Dan
    Ge, Yunjian
    Huang, Xiuxiang
    Li, Zhongyang
    [J]. MEASUREMENT SCIENCE AND TECHNOLOGY, 2011, 22 (03)
  • [8] Experimental and numerical estimations into the force distribution on an occlusal surface utilizing a flexible force sensor array
    Lin, Keng-Ren
    Chang, Chih-Han
    Liu, Tzu-Hsuan
    Lin, Shi-Wei
    Lin, Che-Hsin
    [J]. JOURNAL OF BIOMECHANICS, 2011, 44 (10) : 1879 - 1884
  • [9] Three-axis micro-force sensor with sub-micro-Newton measurement uncertainty and tunable force range
    Muntwyler, S.
    Beyeler, F.
    Nelson, B. J.
    [J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2010, 20 (02)
  • [10] Micro force sensor with piezoresistive amorphous carbon strain gauge
    Peiner, E.
    Tibrewala, A.
    Bandorf, R.
    Biehl, S.
    Luethje, H.
    Doering, L.
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 2006, 130 (75-82) : 75 - 82
12