Dielectric charging in MEMS switches after ion-gun irradiation

被引：0
|
作者：
Molinero, D. [1 ]
Castaner, L. [1 ]
机构：
[1] Univ Politecn Cataluna, Micro & Nanotechnol Grp, C Jordi Girona 1-3,Campus N Modul C4, ES-08034 Barcelona, Spain
来源：
2007 SPANISH CONFERENCE ON ELECTRON DEVICES, PROCEEDINGS | 2007年
关键词：
D O I：
10.1109/SCED.2007.384027
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper we introduce a novel method to characterize dielectric charging phenomena based on the discharge current measurement. The dielectric is charged using an ion gun radiation. It is shown that both the charge sign and amount can be independently measured and that the results can be related to the pull-in shift as measured from C-V characteristics. Analysis of several time constants extracted from discharge current measurement provides further insight on the charge dynamics, governed by the dielectric parameters.
引用
收藏
页码：205 / +
页数：2
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