Emission spectroscopy diagnostics of plasma electron temperature

Electron temperature is one of the important parameters of plasma. It is very difficult to measure the electron temperature exactly and instantly owing to its complexity during discharge. As a plasma diagnostics technique, emission spectroscopy is widely applied in the study and diagnosis of any kind of plasma, because of its simple instrument system, noninterference of measurement, high sensitivity and fast responsibility. In the present paper, some methods for plasma electron temperature diagnosis, such as two lines method, multiline slope method, isoelectronic line method, Saha-Boltzmann equation, absolute intensity method, were introduced. And the applications of these methods were reviewed to provide reference for choosing appropriate methods in practice.