Thin-film zero-group-velocity Lamb wave resonator

被引：34

作者：

Yantchev, Ventsislav ^{[1
]}

Arapan, Lilia ^{[1
]}

Katardjiev, Ilia ^{[1
]}

Plessky, Victor ^{[2
]}

机构：

[1] Uppsala Univ, S-75121 Uppsala, Sweden

[2] GVR Trade SA, CH-2022 Bevaix, Switzerland

来源：

APPLIED PHYSICS LETTERS | 2011年 / 99卷 / 03期

关键词：

D O I：

10.1063/1.3614559

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A concept for the development of thin film micro-acoustic resonators is demonstrated. The basic principles for the design and fabrication of zero-group-velocity Lamb acoustic wave resonators on c-textured thin aluminum nitride films are presented. The experimental results demonstrate that the zero-group-velocity waves can be employed in high frequency resonators with small form factors. (C) 2011 American Institute of Physics. [doi:10.1063/1.3614559]

引用

页数：3

共 9 条

[1] ELECTROMECHANICAL COUPLING TO LAMB AND SHEAR-HORIZONTAL MODES IN PIEZOELECTRIC PLATES
ADLER, EL
[J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1989, 36 (02) : 223 - 230
[2] Microbalance chemical sensor based on thin-film bulk acoustic wave resonators -: art. no. 173504
Benetti, M
Cannatà, D
Di Pietrantonio, F
Foglietti, V
Verona, E
[J]. APPLIED PHYSICS LETTERS, 2005, 87 (17) : 1 - 3
[3] Lateral-field-excited thin-film Lamb wave resonator -: art. no. 154103
Bjurström, J
Katardjiev, I
Yantchev, V
[J]. APPLIED PHYSICS LETTERS, 2005, 86 (15) : 1 - 3
[4] LiNbO3 thin film for A1 mode of Lamb wave resonators
Kadota, Michio
Ogami, Takashi
Yamamoto, Kansho
Tochishita, Hikari
[J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2011, 208 (05): : 1068 - 1071
[5] Extraction of lateral eigenmode properties in thin film bulk acoustic wave resonator from interferometric measurements
Kokkonen, Kimmo
Pensala, Tuomas
Meltaus, Johanna
Kaivola, Matti
[J]. APPLIED PHYSICS LETTERS, 2010, 96 (17)
[6] Guided acoustic wave resonators using an acoustic Bragg mirror
Kone, I.
Domingue, F.
Reinhardt, A.
Jacquinot, H.
Borel, M.
Gorisse, M.
Parat, G.
Casset, F.
Pellissier-Tanon, D.
Carpentier, J. F.
Buchaillot, L.
Dubus, B.
[J]. APPLIED PHYSICS LETTERS, 2010, 96 (22)
[7] Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications
Lin, Chih-Ming
Yen, Ting-Ta
Felmetsger, Valery V.
Hopcroft, Matthew A.
Kuypers, Jan H.
Pisano, Albert P.
[J]. APPLIED PHYSICS LETTERS, 2010, 97 (08)
[8] Piezoelectric aluminum nitride vibrating contour-mode MEMS resonators
Piazza, Gianluca
Stephanou, Philip J.
Pisano, Albert P.
[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2006, 15 (06) : 1406 - 1418
[9] TELSCHOW KL, 2003, P IEEE ULTR S OCT, V1, P280

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