Volume Manufacturing of High Power Diode Lasers Using 6" Wafers

被引：4

作者：

Wang, Jun ^{[1
,2
]}

Tan, Shaoyang ^{[1
]}

Liu, Heng ^{[1
]}

Li, Bo ^{[1
]}

Hu, Yiwen ^{[1
]}

Zhao, Run ^{[1
]}

Xiao, Xiao ^{[1
]}

Cheng, Yang ^{[1
]}

Guo, Yintao ^{[1
]}

Zhao, Wu ^{[2
]}

Zhang, Lichen ^{[2
]}

Miao, Pei ^{[2
]}

Guo, Lu'an ^{[1
]}

Deng, Guoliang ^{[2
]}

Yang, Huomu ^{[2
]}

Zhou, Hao ^{[2
]}

Zhang, Hong ^{[2
]}

Liao, Xinsheng ^{[1
]}

机构：

[1] Suzhou Everbright Photon Co Ltd, Suzhou, Peoples R China

[2] Sichuan Univ, Chengdu, Peoples R China

来源：

HIGH-POWER DIODE LASER TECHNOLOGY XX | 2022年 / 11983卷

关键词：

High power; Diode laser; Volume manufacturing; 6 '' Wafer; GaAs fabrication;

D O I：

10.1117/12.2610727

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

High power diode lasers are widely used as the pump sources for fiber lasers and solid-state lasers, or the light sources for direct diode laser systems. To meet the emerging needs of fiber lasers, solid state lasers and direct diode laser systems, diode lasers are moving towards higher volume manufacturing, along with higher performance and lower cost. In this paper, we will present our progresses in these areas. We have set up a 6 '' GaAs wafer production line for high power diode laser chips, which includes MOCVD epitaxy and wafer fabrication. With the 6 '' wafer production line, we are producing multi-million chips per month for fiber laser pumping. The 6 '' wafers show great uniformity and reproducibility. Device performance is outstanding, with near 70% efficiency and high CW roll-over power.

引用

页数：9

共 10 条

[1] Reliability of High Performance 9xx-nm Single Emitter Diode Lasers
Bao, Ling
Wang, Jun
DeVito, Mark
Xu, Dapeng
Wise, Damian
Leisher, Paul
Grimshaw, Mike
Dong, Weimin
Zhang, Shiguo
Price, Kirk
Li, Daming
Bai, Chendong
Patterson, Steve
Martinsen, Rob
[J]. HIGH-POWER DIODE LASER TECHNOLOGY AND APPLICATIONS VIII, 2010, 7583
[2] Dan J., INFRARED LASER ENG
[3] Experimental and Modeling Study on the High-Performance p++-GaAs/n++-GaAs Tunnel Junctions with Silicon and Tellurium Co-Doped InGaAs Quantum Well Inserted
Gou, Yudan
Wang, Jun
Cheng, Yang
Guo, Yintao
Xiao, Xiao
Liu, Heng
Tan, Shaoyang
Zhou, Li
Yang, Huomu
Deng, Guoliang
Zhou, Shouhuan
[J]. CRYSTALS, 2020, 10 (12): : 1 - 10
[4] A Modeling and Experimental Study on the Growth of VCSEL Materials Using an 8 x 6 Inch Planetary MOCVD Reactor
Gou, Yudan
Wang, Jun
Cheng, Yang
Guo, Yintao
Xiao, Xiao
Zhou, Shouhuan
[J]. COATINGS, 2020, 10 (08)
[5] International Organization for Standardization, 2003, 175262003 ISO
[6] High Brightness Diodes & Fiber-coupled Modules
Kanskar, M.
Bao, L.
Chen, Z.
Hemenway, M.
Dawson, D.
DeVito, M.
Dong, W.
Grimshaw, M.
Guan, X.
Kennedy, K.
Martinsen, R.
Urbanek, W.
Zhang, S.
[J]. HIGH-POWER DIODE LASER TECHNOLOGY AND APPLICATIONS XIII, 2015, 9348
[7] Wang B., IEEE PHOTON TECHNOL
[8] Reliability and Performance of 808nm Single Emitter Multi-Mode Laser Diodes
Wang, J.
Bao, L.
DeVito, M.
Xu, D.
Wise, D.
Grimshaw, M.
Dong, W.
Zhang, S.
Bai, C.
Leisher, P.
Li, D.
Zhou, H.
Patterson, S.
Martinsen, R.
Haden, J.
[J]. HIGH-POWER DIODE LASER TECHNOLOGY AND APPLICATIONS VIII, 2010, 7583
[9] High efficiency 600 W, 100 μm wavelength stabilized fiber coupled laser diode module for fiber laser pumping
Yu, Hao
Tan, Shaoyang
Pan, Huadong
Sun, Shujuan
Li, Juan
Wang, Jun
[J]. HIGH-POWER DIODE LASER TECHNOLOGY XIX, 2021, 11668
[10] Development of a 350 W, 50 μm, 0.15 NA wavelength stabilized fiber coupled laser diode module for pumping Yb-doped fiber laser
Yu, Hao
Tan, Shaoyang
Pan, Huadong
Sun, Shujuan
Li, Juan
Wang, Jun
[J]. HIGH-POWER DIODE LASER TECHNOLOGY XVIII, 2020, 11262

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