Injection-moulded scanning force microscopy probes

被引:12
作者
McFarland, AW
Poggi, MA
Bottomley, LA
Colton, JS
机构
[1] Georgia Inst Technol, George W Woodruff Sch Mech Engn, Atlanta, GA 30332 USA
[2] Georgia Inst Technol, Sch Chem & Biochem, Atlanta, GA 30332 USA
关键词
D O I
10.1088/0957-4484/16/8/045
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
This paper presents the first production and demonstration of thermoplastic scanning force microscopy cantilevers with integrated tips fabricated via injection moulding. Their imaging resolution, clarity, and accuracy are equal to conventional silicon-type parts. The tips exhibit acceptable wear and are ready for use upon removal from the injection mould. This work shows the ability to economically mass-produce SFM probes with arbitrary shapes and features, as well as tailorable physical and chemical properties, which until now were limited by the properties of silicon and integrated-circuit processing technology used to make current commercial SFM probes.
引用
收藏
页码:1249 / 1252
页数:4
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