Integration challenge of silicon photonics with microelectronics

被引：0

作者：

Paniccia, M ^{[1
]}

Liu, AS ^{[1
]}

Izhaky, N ^{[1
]}

Barkai, A ^{[1
]}

机构：

[1] Intel Corp, Photon Technol Lab, Santa Clara, CA 95054 USA

来源：

2005 2nd IEEE International Conference on Group IV Photonics | 2005年

关键词：

D O I：

暂无

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this presentation we discuss some practical issues and challenges associated with processing silicon photonic devices in a high volume CMOS manufacturing environment and the challenges of integrating the photonic devices with microelectronics.

引用

页码：20 / 22

页数：3

共 3 条

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