Improved Focused Ion Beam Target Preparation of (S)TEM Specimen-A Method for Obtaining Ultrathin Lamellae

被引：20

作者：

Lechner, Lorenz ^{[1
]}

Biskupek, Johannes ^{[1
]}

Kaiser, Ute ^{[1
]}

机构：

[1] Univ Ulm, Ctr Electron Microscopy, Mat Sci Grp, Ulm, Germany

来源：

MICROSCOPY AND MICROANALYSIS | 2012年 / 18卷 / 02期

关键词：

FIB; target preparation; low voltage; TEM; STEM; sample preparation; TEM SAMPLES;

D O I：

10.1017/S1431927611012499

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Specimen quality is vital to (scanning) transmission electron microscopy (TEM) investigations. In particular, thin specimens are required to obtain excellent high-resolution TEM images. Conventional focused ion beam (FIB) preparation methods cannot be employed to reliably create high quality specimens much thinner than 20 nm. We have developed a method for in situ target preparation of ultrathin TEM lamellae by FIB milling. With this method we are able to routinely obtain large area lamellae with coplanar faces, thinner than 10 nm. The resulting specimens are suitable for low kV TEM as well as scanning TEM. We have demonstrated atomic resolution by Cs-corrected high-resolution TEM at 20 kV on a FIB milled Si specimen only 4 nm thick; its amorphous layer measuring less than 1 nm in total.

引用

页码：379 / 384

页数：6

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