Measuring Devices Based on Molecular-Electronic Transducers

被引:18
作者
Bugaev, A. S. [1 ,2 ]
Antonov, A. N. [1 ,3 ]
Agafonov, B. M. [1 ,4 ]
Belotelov, K. S. [4 ]
Vergeles, S. S. [1 ,5 ]
Dudkin, P. V. [1 ]
Egorov, E. V. [1 ,4 ]
Egorov, I. V. [1 ,4 ]
Zhevnenko, D. A. [1 ,6 ,7 ]
Zhabin, S. N. [1 ]
Zaitsev, D. L. [1 ,3 ,4 ]
Krishtop, T. V. [7 ]
Neeshpapa, A. V. [1 ,4 ]
Popov, V. G. [1 ,8 ]
Uskov, V. V. [1 ]
Shabalina, A. S. [1 ,4 ]
Krishtop, V. G. [7 ,8 ]
机构
[1] Moscow Inst Phys & Technol, Dolgoprudnyi 141700, Moscow Oblast, Russia
[2] Russian Acad Sci, Kotelnikov Inst Radio Engn & Elect, Moscow 125009, Russia
[3] NordLab LLC, Dolgoprudnyi 141700, Moscow Oblast, Russia
[4] R Sensors LLC, Dolgoprudnyi 141701, Moscow Oblast, Russia
[5] Russian Acad Sci, Landau Inst Theoret Phys, Chernogolovka 142432, Moscow Oblast, Russia
[6] AO Mol Elect Res Inst, Zelenograd 124460, Russia
[7] Seismotronics LLC, Moscow 141700, Russia
[8] Russian Acad Sci, Inst Microelect Technol & High Pur Mat, Chernogolovka 142432, Moscow Oblast, Russia
基金
俄罗斯基础研究基金会;
关键词
ELECTROCHEMICAL-CELL; CONVECTIVE DIFFUSION; NOISE; MASS;
D O I
10.1134/S1064226918110025
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The basic principles of operation of the sensors based on molecular-electronic transducers (METs) are described. The review of investigations of physical processes into MET and their operating characteristics are considered. Modern MET manufacturing technologies and the production methods and the new applications of planar microelectronic METs are discussed. An overview of devices and systems based on the METs is given.
引用
收藏
页码:1339 / 1351
页数:13
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