MEMS-Mirror based trajectory resolution and precision enabled by two different piezoresistive sensor technologies

被引：13

作者：

Grahmann, Jan ^{[1
]}

Dreyhaupt, Andre ^{[1
]}

Drabe, Christian ^{[1
]}

Schroedter, Richard ^{[1
]}

Kamenz, Joerg ^{[1
]}

Sandner, Thilo ^{[1
]}

机构：

[1] Fraunhofer Inst Photon Microsyst IPMS, Maria Reiche Str 2, D-01109 Dresden, Germany

来源：

MOEMS AND MINIATURIZED SYSTEMS XV | 2016年 / 9760卷

关键词：

Micro mirror; quasistatic mirror; piezoresistive; position sensor; controlled feedback loop; position resolution; trajectory precisision;

D O I：

10.1117/12.2212965

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Two new technological process flows for the piezoresistive position detection of resonant and quasistatic micro scanning mirrors were developed to increase sensitivities by a factor of 3.6 compared to former sensors, improve signal to noise ratio of the sensor signal and to allow controlled feedback loop operation. The sensor types use differently doped and deposited silicon. One is based on single crystal silicon with a pn-junction to isolate the active sensor area from the device layer silicon, the other one is based on a deposited and structured polysilicon. The sensor characteristics are compared including light, temperature dependence and reliability results.

引用

页数：11