Synthesis and characterization of TiO2 nanotubes for humidity sensing

被引：136

作者：

Zhang, Yanyan ^{[1
]}

Fu, Wuyou ^{[1
]}

Yang, Haibin ^{[1
]}

Qi, Qi ^{[2
]}

Zeng, Yi ^{[1
,2
]}

Zhang, Tong ^{[2
]}

Ge, Ruixia ^{[1
]}

Zou, Guangtian ^{[1
]}

机构：

[1] Jilin Univ, Natl Lab Superhard Mat, Changchun 130012, Peoples R China

[2] Jilin Univ, Coll Elect Sci & Engn, State Key Lab Integrated Optoelect, Changchun 130012, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2008年 / 254卷 / 17期

关键词：

titania nanotubes; anodization; humidity sensor; thin film; nanostructure;

D O I：

10.1016/j.apsusc.2008.02.106

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The highly ordered TiO2 thin films are prepared by anodic oxidation and calcined at 300, 400, 500 and 600 degrees C, respectively. X-ray diffraction (XRD) and field emission scanning electron microscopy (FESEM) are employed to analyze the structure and the morphology of the TiO2 films. We design a novel sensor to investigate the humidity sensing behaviours of the samples. The samples calcined at 600 degrees C show high sensitivity with nearly two orders change in the resistance and short response and recovery time (< 190 s) during the relative humidity variation from 11 to 95%. (C) 2008 Elsevier B.V. All rights reserved.

引用

页码：5545 / 5547

页数：3

共 17 条

[1] Self-organized porous titanium oxide prepared in H2SO4/HF electrolytes [J].

Beranek, R ;

Hildebrand, H ;

Schmuki, P .

ELECTROCHEMICAL AND SOLID STATE LETTERS, 2003, 6 (03) :B12-B14

[2] MICROSTRUCTURE AND HUMIDITY-SENSITIVE CHARACTERISTICS OF ALPHA-FE2O3 CERAMIC SENSOR [J].

CANTALINI, C ;

PELINO, M .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1992, 75 (03) :546-551

[3]

FAGAN JG, 1993, AM CERAM SOC BULL, V72, P119

[4] Titanium oxide nanotubes prepared in phosphate electrolytes [J].

Ghicov, A ;

Tsuchiya, H ;

Macak, JM ;

Schmuki, P .

ELECTROCHEMISTRY COMMUNICATIONS, 2005, 7 (05) :505-509

[5] A novel capacitive-type humidity sensor using CMOS fabrication technology [J].

Gu, L ;

Huang, QA ;

Qin, M .

SENSORS AND ACTUATORS B-CHEMICAL, 2004, 99 (2-3) :491-498

[6] Relative humidity sensor with optical fiber Bragg gratings [J].

Kronenberg, P ;

Rastogi, PK ;

Giaccari, P ;

Limberger, HG .

OPTICS LETTERS, 2002, 27 (16) :1385-1387

[7] Humidity sensitive field effect transistors [J].

Lee, SP ;

Park, KJ .

SENSORS AND ACTUATORS B-CHEMICAL, 1996, 35 (1-3) :80-84

[8] High-aspect-ratio TiO2 nanotubes by anodization of titanium [J].

Macák, JM ;

Tsuchiya, H ;

Schmuki, P .

ANGEWANDTE CHEMIE-INTERNATIONAL EDITION, 2005, 44 (14) :2100-2102

[9] Semiconducting properties of self-organized TiO2 nanotubes [J].

Munoz, A. G. .

ELECTROCHIMICA ACTA, 2007, 52 (12) :4167-4176

[10] Effect of water content of ethylene glycol as electrolyte for synthesis of ordered titania nanotubes [J].

Raja, K. S. ;

Gandhi, T. ;

Misra, M. .

ELECTROCHEMISTRY COMMUNICATIONS, 2007, 9 (05) :1069-1076

← 1 2 →