Excitation and dynamics of liquid tin micrometer droplet generation

被引:14
作者
Rollinger, B. [1 ,2 ]
Abhari, R. S. [1 ]
机构
[1] Swiss Fed Inst Technol, Lab Energy Convers, CH-8092 Zurich, Switzerland
[2] Cymer LLC, 17075 Thornmint Ct, San Diego, CA 92127 USA
关键词
BREAK-UP; STREAMS; JET;
D O I
10.1063/1.4955114
中图分类号
O3 [力学];
学科分类号
08 ; 0801 ;
摘要
The dynamics of capillary breakup-based droplet generation are studied for an excitation system based on a tunable piezoelectrically actuated oscillating piston, which generates acoustic pressure waves at the dispenser nozzle. First, the non-ideal pressure boundary conditions of droplet breakup are measured using a fast response pressure probe. A structural analysis shows that the axial modes of the excitation system are the main reasons for the resonance peaks in the pressure response. Second, a correlation between the nozzle inlet pressure and the droplet timing jitter is established with the help of experiments and a droplet formation model. With decreasing wave number, the growth rate of the main excitation decreases, while noise contributions with wave numbers with higher growth rates lead to a non-deterministic structure of the droplet train. A highly coherent and monodisperse droplet stream is obtained when the excitation system is tuned to generate high acoustic pressures at the desired operation frequency and when the noise level on the jet is limited. The jet velocity, hence droplet spacing for a set frequency is then adjusted by varying the reservoir pressure, according to the trade-off between lowest wave number and acceptable timing jitter. Published by AIP Publishing.
引用
收藏
页数:20
相关论文
共 53 条
[21]   NONLINEAR BREAKUP OF A LAMINAR LIQUID JET [J].
LAFRANCE, P .
PHYSICS OF FLUIDS, 1975, 18 (04) :428-432
[22]   Piezoelectric dispenser based on a piezoelectric-metal-cavity actuator [J].
Lam, K. H. ;
Sun, C. L. ;
Kwok, K. W. ;
Chan, H. L. W. .
REVIEW OF SCIENTIFIC INSTRUMENTS, 2009, 80 (07)
[23]  
Lass N., 2011, TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, P1452, DOI 10.1109/TRANSDUCERS.2011.5969623
[24]   DROP FORMATION IN A LIQUID JET [J].
LEE, HC .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1974, 18 (04) :364-369
[25]   High Temperature Fast Response Aerodynamic Probe [J].
Lenherr, Christian ;
Kalfas, Anestis I. ;
Abhari, Reza S. .
JOURNAL OF ENGINEERING FOR GAS TURBINES AND POWER-TRANSACTIONS OF THE ASME, 2011, 133 (01)
[26]  
McCarthy M. J., 1974, Chemical Engineering Journal, V7, P1, DOI 10.1016/0300-9467(74)80021-3
[27]  
MELFORD DA, 1957, J I MET, V85, P197
[28]   EXPANSION AND CONTRACTION OF CAPILLARY JETS OF NEWTONIAN LIQUIDS [J].
MIDDLEMAN, S ;
GAVIS, J .
PHYSICS OF FLUIDS, 1961, 4 (03) :355-359
[29]   100W 1st Generation Laser-Produced Plasma light source system for HVM EUV lithography [J].
Mizoguchi, Hakaru ;
Abe, Tamotsu ;
Watanabe, Yukio ;
Ishihara, Takanobu ;
Ohta, Takeshi ;
Hori, Tsukasa ;
Yanagida, Tatsuya ;
Nagano, Hitoshi ;
Yabu, Takayuki ;
Nagai, Shinji ;
Soumagne, Georg ;
Kurosu, Akihiko ;
Nowak, Krzysztof M. ;
Suganuma, Takashi ;
Moriya, Masato ;
Kakizaki, Kouji ;
Sumitani, Akira ;
Kameda, Hidenobu ;
Nakarai, Hiroaki ;
Fujimoto, Junichi .
EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY II, 2011, 7969
[30]   Sn droplet target development for laser produced plasma EUV light source - art. no. 692130 [J].
Nakano, Masaki ;
Yabu, Takayuki ;
Someya, Hiroshi ;
Abe, Tamotsu ;
Soumagne, Georg ;
Endo, Akira ;
Sumitani, Akira .
EMERGING LITHOGRAPHIC TECHNOLOGIES XII, PTS 1 AND 2, 2008, 6921 :92130-92130