Utilization of ultra-thin n-type Hydrogenated Nanocrystalline Silicon for Silicon Heterojunction Solar Cells

被引：1
作者：
Qiu, Depeng [1 ]
Duan, Weiyuan [1 ]
Lambertz, Andreas [1 ]
Bittkau, Karsten [1 ]
Qiu, Kaifu [1 ]
Ding, Kaining [1 ]
机构：
[1] Forschungszentrum Julich, IEK Photovolta 5, Wilhelm Johnen Str, D-52425 Julich, Germany
来源：
2021 IEEE 48TH PHOTOVOLTAIC SPECIALISTS CONFERENCE (PVSC) | 2021年
关键词：
Silicon heterojunction solar cell; Nanocrystalline silicon; MICROCRYSTALLINE SILICON;
D O I：
10.1109/PVSC43889.2021.9518937
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
To optimize the electrical performance of silicon heterojunction solar cell devices, the electronic properties and microstructure of n-type nc-Si:H were characterized and analyzed. It was found that higher conductivity and crystalline volume fraction (F-c) of nc-Si:H can be obtained at lower silane gas fraction (f(SiH4)), lower power and higher phosphorous gas fraction (f(PH3)). In our case, there is a decline of the passivation for the devices with nc-Si:H after sputtering process. By increasing the phosphine flow fraction, the sputter damage can be reduced and 3%(abs) gain of FF as well as 0.7%(abs) gain of efficiency is reached compared with reference. The best solar cell exhibits the V-oc of 733.3 mV, FF of 79.7%, J(sc) of 39.00 mA/cm(2) and eta of 22.79% at the M2 size wafer.
引用
收藏
页码：806 / 808
页数：3
相关论文
共 11 条
[1]   Impact of carrier recombination on fill factor for large area heterojunction crystalline silicon solar cell with 25.1% efficiency [J].
Adachi, Daisuke ;
Hernandez, Jose Luis ;
Yamamoto, Kenji .
APPLIED PHYSICS LETTERS, 2015, 107 (23)
[2]   Multiscale Transparent Electrode Architecture for Efficient Light Management and Carrier Collection in Solar Cells [J].
Boccard, Mathieu ;
Battaglia, Corsin ;
Haenni, Simon ;
Soederstroem, Karin ;
Escarre, Jordi ;
Nicolay, Sylvain ;
Meillaud, Fanny ;
Despeisse, Matthieu ;
Ballif, Christophe .
NANO LETTERS, 2012, 12 (03) :1344-1348
[3]   Damage at hydrogenated amorphous/crystalline silicon interfaces by indium tin oxide overlayer sputtering [J].
Demaurex, Benedicte ;
De Wolf, Stefaan ;
Descoeudres, Antoine ;
Holman, Zachary Charles ;
Ballif, Christophe .
APPLIED PHYSICS LETTERS, 2012, 101 (17)
[4]   IMPROVEMENT OF GRAIN-SIZE AND DEPOSITION RATE OF MICROCRYSTALLINE SILICON BY USE OF VERY HIGH-FREQUENCY GLOW-DISCHARGE [J].
FINGER, F ;
HAPKE, P ;
LUYSBERG, M ;
CARIUS, R ;
WAGNER, H ;
SCHEIB, M .
APPLIED PHYSICS LETTERS, 1994, 65 (20) :2588-2590
[5]   Amorphous/crystalline silicon interface defects induced by hydrogen plasma treatments [J].
Geissbuehler, Jonas ;
De Wolf, Stefaan ;
Demaurex, Benedicte ;
Seif, Johannes P. ;
Alexander, Duncan T. L. ;
Barraud, Loris ;
Ballif, Christophe .
APPLIED PHYSICS LETTERS, 2013, 102 (23)
[6]   ROLE OF HYDROGEN DILUTION AND DIBORANE DOPING ON THE GROWTH-MECHANISM OF P-TYPE MICROCRYSTALLINE SILICON FILMS PREPARED BY PHOTOCHEMICAL VAPOR-DEPOSITION [J].
GHOSH, S ;
DE, A ;
RAY, S ;
BARUA, AK .
JOURNAL OF APPLIED PHYSICS, 1992, 71 (10) :5205-5211
[7]   Silicon heterojunction solar cells: Recent technological development and practical aspects - from lab to industry [J].
Haschke, Jan ;
Dupre, Olivier ;
Boccard, Mathieu ;
Ballif, Christophe .
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2018, 187 :140-153
[8]   EVALUATION OF BORON AND PHOSPHORUS DOPING MICROCRYSTALLINE SILICON FILMS [J].
KAYA, H ;
IMURA, T ;
KUSAO, T ;
HIRAKI, A ;
NAKAMURA, O ;
OKAYASU, Y ;
MATSUMURA, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1984, 23 (08) :L549-L551
[9]   Intrinsic microcrystalline silicon:: A new material for photovoltaics [J].
Vetterl, O ;
Finger, F ;
Carius, R ;
Hapke, P ;
Houben, L ;
Kluth, O ;
Lambertz, A ;
Mück, A ;
Rech, B ;
Wagner, H .
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2000, 62 (1-2) :97-108
[10]   Tuning oxygen impurities and microstructure of nanocrystalline silicon photovoltaic materials through hydrogen dilution [J].
Wen, Chao ;
Xu, Hao ;
He, Wei ;
Li, Zhengping ;
Shen, Wenzhong .
NANOSCALE RESEARCH LETTERS, 2014, 9 :1-9
12