Capacitive Instrumentation and Sensor Fusion for High-Bandwidth Nanopositioning

被引：3
|
作者：
Moore, Steven Ian [1 ]
Fleming, Andrew J. [1 ]
Yong, Yuen Kuan [1 ]
机构：
[1] Univ Newcastle, Sch Elect Engn & Comp, Callaghan, NSW, Australia
来源：
IEEE SENSORS LETTERS | 2019年 / 3卷 / 08期
关键词：
Mechanical sensors; capacitive sensors; displacement measurement; nanopositioning; sensor fusion;
D O I：
10.1109/LSENS.2019.2933065
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Precision capacitive sensing methods encode the measurement in a high frequency signal, which requires demodulation. To extract the measurement, the signal is observed over many cycles limiting the bandwidth of the sensor and introducing an undesirable phase lag. To address this limitation, this article outlines a design, which fuses the output of a standard modulated capacitive sensor and a charge amplifier, providing an instantaneous capacitive measurement whose bandwidth is only limited by the speed at which the electronics operate.
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页数：3
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