共 36 条
[2]
Reactive sputter deposition of tungsten nitride thin films
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
2002, 20 (05)
:1699-1703
[4]
CHARLES L, 2004, J MATER CHEM, V14, P3167
[10]
SUPERCONDUCTING TRANSITION-TEMPERATURES OF REACTIVELY SPUTTERED FILMS OF TANTALUM NITRIDE AND TUNGSTEN NITRIDE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1975, 12 (01)
:107-109