Low melting temperature thin coating of zinc on Si(100) for diamond film growth

被引：4
作者：
Dar, MA
Ansari, SG
Seo, HK
Kim, GS
Kim, YS
Kulkarni, SK
Shin, HS
机构：
[1] Chonbuk Natl Univ, Sch Chem Engn, Thin Film Technol Lab, Chonju 561756, South Korea
[2] JAIST, Sch Math Sci, Tatsunokuchi, Ishikawa 9231292, Japan
[3] Univ Pune, Dept Phys, Pune 411007, India
来源：
CARBON | 2005年 / 43卷 / 04期
基金：
日本学术振兴会;
关键词：
diamond; catalyst; chemical vapor deposition; atomic force microscopy; Raman spectroscopy;
D O I：
10.1016/j.carbon.2004.10.029
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The growth of a diamond film using low melting point coating of zinc on Si(1 0 0) substrate was investigated. The growth and surface morphology of the film and the substrate were investigated using atomic force microscopy (AFM) and scanning electron microscopy (SEM). The quality of the film was investigated using Raman spectroscopy. The surface roughness of the sample film was 88 nm on silicon. The results show that the quality of the diamond film on the zinc covered surface is better than that directly on the scratched silicon substrate.
引用
收藏
页码：858 / 860
页数：3
相关论文
共 11 条
  • [1] CHIEM CV, 2002, J VAC SCI TECHNOL A, V20, P202
  • [2] Rheotaxial diamond growth by chemical vapor deposition
    Fang, PH
    Hou, L
    [J]. MATERIALS RESEARCH INNOVATIONS, 2000, 3 (06) : 360 - 364
  • [3] Direct quantitative detection of the sp3 bonding in diamond-like carbon films using ultraviolet and visible Raman spectroscopy
    Gilkes, KWR
    Prawer, S
    Nugent, KW
    Robertson, J
    Sands, HS
    Lifshitz, Y
    Shi, X
    [J]. JOURNAL OF APPLIED PHYSICS, 2000, 87 (10) : 7283 - 7289
  • [4] NEW CATALYSTS FOR DIAMOND GROWTH UNDER HIGH-PRESSURE AND HIGH-TEMPERATURE
    KANDA, H
    AKAISHI, M
    YAMAOKA, S
    [J]. APPLIED PHYSICS LETTERS, 1994, 65 (06) : 784 - 786
  • [5] Diamond deposition on Au/amorphotis Si thin films
    Kao, CK
    Yan, JK
    Chang, L
    Cho, SY
    Chen, HG
    [J]. DIAMOND AND RELATED MATERIALS, 2004, 13 (4-8) : 585 - 589
  • [6] STUDIES ON NUCLEATION PROCESS IN DIAMOND CVD - AN OVERVIEW OF RECENT DEVELOPMENTS
    LIU, HM
    DANDY, DS
    [J]. DIAMOND AND RELATED MATERIALS, 1995, 4 (10) : 1173 - 1188
  • [7] MASSALSKI TB, 1986, PUB AM SOC MET OHIO
  • [8] STRUCTURAL INVESTIGATION OF XENON-ION-BEAM-IRRADIATED GLASSY-CARBON
    MCCULLOCH, DG
    PRAWER, S
    HOFFMAN, A
    [J]. PHYSICAL REVIEW B, 1994, 50 (09): : 5905 - 5917
  • [9] Precipitation of diamond from MexCyHz solutions at 1 ATM
    Roy, R
    Cherian, KA
    Cheng, JP
    Badzian, A
    Langlade, C
    Dewan, H
    Drawl, W
    [J]. MATERIALS RESEARCH INNOVATIONS, 1997, 1 (02) : 117 - 129
  • [10] Low roughness diamond films produced at temperatures less than 600°C
    Silva, F
    Gicquel, A
    Chiron, A
    Achard, J
    [J]. DIAMOND AND RELATED MATERIALS, 2000, 9 (12) : 1965 - 1970
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