Analytic representations of the dielectric functions of materials for device and structural modeling

被引:85
作者
Leng, J
Opsal, J
Chu, H
Senko, M
Aspnes, DE
机构
[1] Therma Wave Inc, Fremont, CA 94539 USA
[2] Aspnes Associates Inc, Apex, NC 27502 USA
关键词
analytic representations; dielectric functions; crystalline Si; amorphous Si; silicon nitride;
D O I
10.1016/S0040-6090(97)00799-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Analytic representations of the dielectric function epsilon are needed for the analysis of optical data of complex materials and structures. Here, we examine various harmonic-oscillator-based representations of the dielectric functions of the silicon-related materials, crystalline Si, amorphous Si, and silicon nitride. For crystalline semiconductors we develop a new representation with a prefactor proportional to omega(-2), the expected response for materials with wavefunctions that are eigenfunctions of the momentum operator. (C) 1998 Elsevier Science S.A.
引用
收藏
页码:132 / 136
页数:5
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