Wavelength Tuning and Controlled Temperature Dependence of MEMS VCSELs with Thermally and Electrostatically Actuated Micromachined Mirror

被引：0
|
作者：
Nakahama, Masanori [1 ]
Sano, Hayato [1 ]
Inoue, Shunya [1 ]
Sakaguchi, Takahiro [1 ]
Matsutani, Akihiro [2 ]
Koyama, Fumio [1 ]
机构：
[1] Tokyo Inst Technol, Photon Integrat Syst Res Ctr, Midori Ku, 4259 R2-22 Nagatsuta, Yokohama, Kanagawa 2268503, Japan
[2] Tokyo Inst Technol, Semicond & MEMS Proc Ctr, Yokohama, Kanagawa 2268503, Japan
来源：
2013 18TH MICROOPTICS CONFERENCE (MOC) | 2013年
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We demonstrate the wavelength tuning of 850nm-GaAs-VCSELs with a controlled temperature dependence of wavelengths using a thermally and electrostatically actuated MEMS structure. The wavelength tuning and the control of the temperature dependence are independently realized. The result indicates a possibility of realizing tunable and athermal VCSELs with engineerd temperature dependence.
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