Pulsed laser deposition of SrTiO3/LaGaO3 and SrTiO3/LaAlO3: Plasma plume effects

被引：66

作者：

Aruta, C. ^{[1
]}

Amoruso, S.

Bruzzese, R.

Wang, X.

Maccariello, D.

Granozio, F. Miletto

di Uccio, U. Scotti

机构：

[1] Complesso Univ Monte St Angelo, Dipartimento Sci Fis, I-80126 Naples, Italy

来源：

APPLIED PHYSICS LETTERS | 2010年 / 97卷 / 25期

关键词：

All Open Access; Green;

D O I：

10.1063/1.3529487

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The pulsed laser deposition of SrTiO3/LaGaO3 and SrTiO3/LaAlO3 interfaces is analyzed with a focus on the kinetic energy of the ablated species. LaGaO3 and LaAlO3 plasma plumes were studied by fast photography and space-resolved optical emission spectroscopy. Reflection high energy electron diffraction was performed proving a layer-by-layer growth up to 10(-1) mbar oxygen pressure. The role of the energetic plasma plume on the two-dimensional growth and on the presence of interfacial defects at different oxygen growth pressures is discussed in connection with the conducting properties of the polar/nonpolar interfaces. (C) 2010 American Institute of Physics. [doi:10.1063/1.3529487]

引用

页数：3

共 15 条

[1] Optimization of La0.7Ba0.3MnO3-δ complex oxide laser ablation conditions by plume imaging and optical emission spectroscopy [J].

Amoruso, S. ;

Aruta, C. ;

Bruzzese, R. ;

Maccariello, D. ;

Maritato, L. ;

Granozio, F. Miletto ;

Orgiani, P. ;

di Uccio, U. Scotti ;

Wang, X. .

JOURNAL OF APPLIED PHYSICS, 2010, 108 (04)

[2] Atomic scale heating in cathodic arc plasma deposition [J].

Anders, A .

APPLIED PHYSICS LETTERS, 2002, 80 (06) :1100-1102

[3] Mechanisms for O2 dissociation during pulsed-laser ablation and deposition [J].

Camposeo, A ;

Cervelli, F ;

Fuso, F ;

Allegrini, M ;

Arimondo, E .

APPLIED PHYSICS LETTERS, 2001, 78 (16) :2402-2404

[4]

Carrasco J, 2005, PHYS STATUS SOLIDI C, V2, P153, DOI 10.1002/pssc.200460134

[5] Structure-Property Relation of SrTiO3/LaAlO3 Interfaces [J].

Huijben, Mark ;

Brinkman, Alexander ;

Koster, Gertjan ;

Rijnders, Guus ;

Hilgenkamp, Hans ;

Blank, Dave H. A. .

ADVANCED MATERIALS, 2009, 21 (17) :1665-1677

[6] Effect of oxygen vacancies in the SrTiO3 substrate on the electrical properties of the LaAlO3/SrTiO3 interface [J].

Kalabukhov, Alexey ;

Gunnarsson, Robert ;

Borjesson, Johan ;

Olsson, Eva ;

Claeson, Tord ;

Winkler, Dag .

PHYSICAL REVIEW B, 2007, 75 (12)

[7]

Lide D. R., 1993, 12HANDBOOK CHEM PHYS

[8] Electron energy loss spectroscopy determination of Ti oxidation state at the (001) LaAlO3/SrTiO3 interface as a function of LaAlO3 growth conditions [J].

Maurice, J. -L. ;

Herranz, G. ;

Colliex, C. ;

Devos, I. ;

Carretero, C. ;

Barthelemy, A. ;

Bouzehouane, K. ;

Fusil, S. ;

Imhoff, D. ;

Jacquet, E. ;

Jomard, F. ;

Ballutaud, D. ;

Basletic, M. .

EPL, 2008, 82 (01)

[9] A high-mobility electron gas at the LaAlO3/SrTiO3 heterointerface [J].

Ohtomo, A ;

Hwang, HY .

NATURE, 2004, 427 (6973) :423-426

[10] Conducting interfaces between band insulating oxides: The LaGaO3/SrTiO3 heterostructure [J].

Perna, P. ;

Maccariello, D. ;

Radovic, M. ;

di Uccio, U. Scotti ;

Pallecchi, I. ;

Codda, M. ;

Marre, D. ;

Cantoni, C. ;

Gazquez, J. ;

Varela, M. ;

Pennycook, S. J. ;

Granozio, F. Miletto .

APPLIED PHYSICS LETTERS, 2010, 97 (15)

← 1 2 →