First-principles prediction of electron grain boundary scattering in fcc metals

被引:19
作者
Zhou, Tianji [1 ]
Jog, Atharv [1 ]
Gall, Daniel [1 ]
机构
[1] Rensselaer Polytech Inst, Dept Mat Sci & Engn, Troy, NY 12180 USA
基金
美国国家科学基金会;
关键词
THIN-FILMS; RESISTIVITY; CU; TRANSPORT; SCALE; CONDUCTIVITY; RESISTANCE; COPPER; MODEL;
D O I
10.1063/5.0098822
中图分类号
O59 [应用物理学];
学科分类号
摘要
The electron reflection probability r at symmetric twin boundaries sigma 3, sigma 5, sigma 9, and sigma 11 is predicted from first principles for the eight most conductive face-centered cubic (fcc) metals. r increases with decreasing interplanar distance of atomic planes parallel to the boundary. This provides the basis for an extrapolation scheme to estimate the reflection probability r(r) at random grain boundaries, which is relatively small, r(r) = 0.28-0.39, for Cu, Ag, and Au due to their nearly spherical Fermi surfaces, but approximately two times higher for Al, Ca, Ni, Rh, and Ir with a predicted r(r) = 0.61-0.72. The metal resistivity in the limit of small randomly oriented grains with fixed average size is expected to be proportional to the materials benchmark quantity rho(o)lambda x r(r)/(1 - r(r)), where rho(o) and lambda are the bulk resistivity and bulk electron mean free path, respectively. Cu has the lowest value for this quantity, indicating that all other fcc metals have a higher resistivity in the limit of small randomly oriented grains. Thus, the conductivity benefit of replacement metals for narrow Cu interconnect lines can only be realized if the grains are larger than the linewidth or exhibit symmetric orientation relationships where r < r(r). Published under an exclusive license by AIP Publishing.
引用
收藏
页数:5
相关论文
共 71 条
  • [1] Adelmann C, 2018, IEEE INT INTERC TECH, P154, DOI 10.1109/IITC.2018.8456484
  • [2] Texture and Grain Boundary Character Distribution in a Thermomechanically Processed OFHC Copper
    Al-Fadhalah, Khaled J.
    [J]. JOURNAL OF ENGINEERING MATERIALS AND TECHNOLOGY-TRANSACTIONS OF THE ASME, 2012, 134 (01):
  • [3] The breakdown of Moore's law induced by weak Anderson localization and by size effects in nano-scale metallic connectors
    Arenas, Claudio
    Herrera, Guillermo
    Munoz, Enrique
    Munoz, Raul C.
    [J]. MATERIALS RESEARCH EXPRESS, 2021, 8 (01)
  • [4] Accounting for the resistivity contribution of grain boundaries in metals: critical analysis of reported experimental and theoretical data for Ni and Cu
    Bakonyi, I
    [J]. EUROPEAN PHYSICAL JOURNAL PLUS, 2021, 136 (04)
  • [5] The specific grain-boundary electrical resistivity of Ni
    Bakonyi, I.
    Isnaini, V. A.
    Kolonits, T.
    Czigany, Zs.
    Gubicza, J.
    Varga, L. K.
    Toth-Kadar, E.
    Pogany, L.
    Peter, L.
    Ebert, H.
    [J]. PHILOSOPHICAL MAGAZINE, 2019, 99 (09) : 1139 - 1162
  • [6] Epitaxial metals for interconnects beyond Cu
    Barmak, Katayun
    Ezzat, Sameer
    Gusley, Ryan
    Jog, Athary
    Kerdsongpanya, Sit
    Khanya, Asim
    Milosevic, Erik
    Richardson, William
    Sentosun, Kadir
    Zangiabadi, Amirali
    Gall, Daniel
    Kaden, William E.
    Mucciolo, Eduardo R.
    Schelling, Patrick K.
    West, Alan C.
    Coffey, Kevin R.
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2020, 38 (03):
  • [7] Surface and grain boundary scattering in nanometric Cu thin films: A quantitative analysis including twin boundaries
    Barmak, Katayun
    Darbal, Amith
    Ganesh, Kameswaran J.
    Ferreira, Paulo J.
    Rickman, Jeffrey M.
    Sun, Tik
    Yao, Bo
    Warren, Andrew P.
    Coffey, Kevin R.
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2014, 32 (06):
  • [8] Understanding Grain Boundary Electrical Resistivity in Cu: The Effect of Boundary Structure
    Bishara, Hanna
    Lee, Subin
    Brink, Tobias
    Ghidelli, Matteo
    Dehm, Gerhard
    [J]. ACS NANO, 2021, 15 (10) : 16607 - 16615
  • [9] Approaches to Measure the Resistivity of Grain Boundaries in Metals with High Sensitivity and Spatial Resolution: A Case Study Employing Cu
    Bishara, Hanna
    Ghidelli, Matteo
    Dehm, Gerhard
    [J]. ACS APPLIED ELECTRONIC MATERIALS, 2020, 2 (07) : 2049 - 2056
  • [10] Reducing Grain-Boundary Resistivity of Copper Nanowires by Doping
    Cesar, Mathieu
    Gall, Daniel
    Guo, Hong
    [J]. PHYSICAL REVIEW APPLIED, 2016, 5 (05):